{"id":6923,"date":"2025-12-04T14:58:17","date_gmt":"2025-12-04T14:58:17","guid":{"rendered":"https:\/\/akademperiodyka.org.ua\/uk\/?p=6923"},"modified":"2026-04-14T13:40:57","modified_gmt":"2026-04-14T13:40:57","slug":"ion-plasma-multilayer","status":"publish","type":"post","link":"https:\/\/akademperiodyka.org.ua\/uk\/books\/scientific_monographs\/ion-plasma-multilayer\/","title":{"rendered":"\u0406\u043e\u043d\u043d\u043e-\u043f\u043b\u0430\u0437\u043c\u043e\u0432\u0456 \u0431\u0430\u0433\u0430\u0442\u043e\u0448\u0430\u0440\u043e\u0432\u0456 \u0442\u0430 \u0431\u0430\u0433\u0430\u0442\u043e\u043a\u043e\u043c\u043f\u043e\u043d\u0435\u043d\u0442\u043d\u0456 \u043f\u043e\u043a\u0440\u0438\u0442\u0442\u044f"},"content":{"rendered":"

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\nORCID ID: https:\/\/orcid.org\/0000-0002-4019-4933<\/a>
\nScopus Author ID: https:\/\/www.scopus.com\/authid\/detail.uri?authorId=7005703838<\/a><\/p>\n

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\nORCID ID: https:\/\/orcid.org\/0000-0002-4623-3243<\/a>
\nScopus Author ID: https:\/\/www.scopus.com\/authid\/detail.uri?authorId=26530793400<\/a><\/p>\n

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\nORCID ID: https:\/\/orcid.org\/0000-0002-3292-5468<\/a>
\nScopus Author ID: https:\/\/www.scopus.com\/authid\/detail.uri?authorId=56962782700<\/a><\/p>\n

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\nORCID ID: https:\/\/orcid.org\/0000-0002-9218-6492<\/a>
\nScopus Author ID: https:\/\/www.scopus.com\/authid\/detail.uri?authorId=36119198500<\/a><\/p>\n

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\nORCID ID: https:\/\/orcid.org\/0000-0002-0646-6704<\/a>
\nScopus Author ID: https:\/\/www.scopus.com\/authid\/detail.uri?authorId=56454275500<\/a>
\nWeb of Science Researcher ID: https:\/\/www.webofscience.com\/wos\/author\/record\/G-9688-2018<\/a><\/p>\n

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\nORCID ID: https:\/\/orcid.org\/0000-0003-1464-3771<\/a>
\nScopus Author ID: https:\/\/www.scopus.com\/authid\/detail.uri?authorId=57221904325<\/a><\/p>\n

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\nORCID ID: https:\/\/orcid.org\/0000-0001-7734-0642<\/a><\/p>\n

\u041c\u0430\u043d\u043e\u0445\u0438\u043d \u0410\u043d\u0434\u0440\u0456\u0439 \u0421\u0435\u0440\u0433\u0456\u0439\u043e\u0432\u0438\u0447, <\/strong>\u043a\u0430\u043d\u0434\u0438\u0434\u0430\u0442 \u0442\u0435\u0445\u043d\u0456\u0447\u043d\u0438\u0445 \u043d\u0430\u0443\u043a, \u0441\u0442\u0430\u0440\u0448\u0438\u0439 \u0434\u043e\u0441\u043b\u0456\u0434\u043d\u0438\u043a, \u0406\u043d\u0441\u0442\u0438\u0442\u0443\u0442 \u043d\u0430\u0434\u0442\u0432\u0435\u0440\u0434\u0438\u0445 \u043c\u0430\u0442\u0435\u0440\u0456\u0430\u043b\u0456\u0432 \u0456\u043c. \u0412.\u00a0\u041c. \u0411\u0430\u043a\u0443\u043b\u044f \u041d\u0410\u041d \u0423\u043a\u0440\u0430\u0457\u043d\u0438, \u0441\u0442\u0430\u0440\u0448\u0438\u0439 \u043d\u0430\u0443\u043a\u043e\u0432\u0438\u0439 \u0441\u043f\u0456\u0432\u0440\u043e\u0431\u0456\u0442\u043d\u0438\u043a \u0432\u0456\u0434\u0434\u0456\u043b\u0443 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0456\u0447\u043d\u043e\u0433\u043e \u0443\u043f\u0440\u0430\u0432\u043b\u0456\u043d\u043d\u044f \u044f\u043a\u0456\u0441\u0442\u044e \u043e\u0431\u0440\u043e\u0431\u043a\u0438 \u0456\u043d\u0441\u0442\u0440\u0443\u043c\u0435\u043d\u0442\u0430\u043c\u0438 \u0456\u0437 \u041d\u0422\u041c
\nORCID ID: https:\/\/orcid.org\/0000-0003-1479-8482<\/a>
\nScopus Author ID: https:\/\/www.scopus.com\/authid\/detail.uri?authorId=37059129600<\/a><\/p>\n

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\nORCID ID: https:\/\/orcid.org\/0000-0002-4497-4419<\/a>
\nScopus Author ID: https:\/\/www.scopus.com\/authid\/detail.uri?authorId=6602346708<\/a><\/p>\n

\u0420\u0435\u0446\u0435\u043d\u0437\u0435\u043d\u0442\u0438:<\/strong><\/p>\n

\u0406\u0432\u0430\u0449\u0435\u043d\u043a\u043e \u0412\u043e\u043b\u043e\u0434\u0438\u043c\u0438\u0440 \u0406\u0432\u0430\u043d\u043e\u0432\u0438\u0447<\/strong>, \u0434\u043e\u043a\u0442\u043e\u0440 \u0444\u0456\u0437\u0438\u043a\u043e-\u043c\u0430\u0442\u0435\u043c\u0430\u0442\u0438\u0447\u043d\u0438\u0445 \u043d\u0430\u0443\u043a, \u043f\u0440\u043e\u0444\u0435\u0441\u043e\u0440,\u00a0\u0406\u043d\u0441\u0442\u0438\u0442\u0443\u0442 \u043f\u0440\u043e\u0431\u043b\u0435\u043c \u043c\u0430\u0442\u0435\u0440\u0456\u0430\u043b\u043e\u0437\u043d\u0430\u0432\u0441\u0442\u0432\u0430 \u0456\u043c.\u00a0\u0406.\u00a0\u041c.\u00a0\u0424\u0440\u0430\u043d\u0446\u0435\u0432\u0438\u0447\u0430 \u041d\u0410\u041d \u0423\u043a\u0440\u0430\u0457\u043d\u0438, \u043f\u0440\u043e\u0432\u0456\u0434\u043d\u0438\u0439 \u043d\u0430\u0443\u043a\u043e\u0432\u0438\u0439 \u0441\u043f\u0456\u0432\u0440\u043e\u0431\u0456\u0442\u043d\u0438\u043a\u00a0\u0432\u0456\u0434\u0434\u0456\u043b\u0443 \u0444\u0456\u0437\u0438\u0447\u043d\u043e\u0433\u043e \u043c\u0430\u0442\u0435\u0440\u0456\u0430\u043b\u043e\u0437\u043d\u0430\u0432\u0441\u0442\u0432\u0430 \u0442\u0443\u0433\u043e\u043f\u043b\u0430\u0432\u043a\u0438\u0445 \u0441\u043f\u043e\u043b\u0443\u043a<\/p>\n

\u041f\u0440\u043e\u0446\u0435\u043d\u043a\u043e \u0406\u0432\u0430\u043d \u042e\u0445\u0438\u043c\u043e\u0432\u0438\u0447<\/strong>, \u0434\u043e\u043a\u0442\u043e\u0440 \u0444\u0456\u0437\u0438\u043a\u043e-\u043c\u0430\u0442\u0435\u043c\u0430\u0442\u0438\u0447\u043d\u0438\u0445 \u043d\u0430\u0443\u043a, \u043f\u0440\u043e\u0444\u0435\u0441\u043e\u0440, \u0421\u0443\u043c\u0441\u044c\u043a\u0438\u0439 \u0434\u0435\u0440\u0436\u0430\u0432\u043d\u0438\u0439 \u0443\u043d\u0456\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442, \u043f\u0440\u043e\u0432\u0456\u0434\u043d\u0438\u0439 \u043d\u0430\u0443\u043a\u043e\u0432\u0438\u0439 \u0441\u043f\u0456\u0432\u0440\u043e\u0431\u0456\u0442\u043d\u0438\u043a \u043a\u0430\u0444\u0435\u0434\u0440\u0438 \u0435\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0456\u043a\u0438, \u0437\u0430\u0433\u0430\u043b\u044c\u043d\u043e\u0457 \u0442\u0430 \u043f\u0440\u0438\u043a\u043b\u0430\u0434\u043d\u043e\u0457 \u0444\u0456\u0437\u0438\u043a\u0438<\/p>\n

\u0428\u0435\u0439\u043a\u0456\u043d \u0421\u0435\u0440\u0433\u0456\u0439 \u0404\u0432\u0433\u0435\u043d\u043e\u0432\u0438\u0447<\/strong>, \u0434\u043e\u043a\u0442\u043e\u0440 \u0442\u0435\u0445\u043d\u0456\u0447\u043d\u0438\u0445 \u043d\u0430\u0443\u043a, \u043f\u0440\u043e\u0444\u0435\u0441\u043e\u0440, \u0406\u043d\u0441\u0442\u0438\u0442\u0443\u0442 \u043d\u0430\u0434\u0442\u0432\u0435\u0440\u0434\u0438\u0445 \u043c\u0430\u0442\u0435\u0440\u0456\u0430\u043b\u0456\u0432 \u0456\u043c. \u0412.\u00a0\u041c. \u0411\u0430\u043a\u0443\u043b\u044f \u041d\u0410\u041d \u0423\u043a\u0440\u0430\u0457\u043d\u0438, \u0437\u0430\u0432\u0456\u0434\u0443\u0432\u0430\u0447 \u0432\u0456\u0434\u0434\u0456\u043b\u0443 \u0444\u043e\u0440\u043c\u0443\u0432\u0430\u043d\u043d\u044f \u043f\u0440\u0435\u0446\u0438\u0437\u0456\u0439\u043d\u0438\u0445 \u0435\u043b\u0435\u043c\u0435\u043d\u0442\u0456\u0432 \u0441\u043a\u043b\u0430\u0434\u043d\u043e \u043f\u0440\u043e\u0444\u0456\u043b\u044c\u043d\u0438\u0445 \u0432\u0438\u0440\u043e\u0431\u0456\u0432<\/p>\n

\n
\u0420\u0456\u043a \u0432\u0438\u0434\u0430\u043d\u043d\u044f:<\/strong>\u00a02025<\/div>\n<\/div>\n
\n
\u0421\u0442\u043e\u0440\u0456\u043d\u043a\u0438:<\/strong> 174<\/div>\n<\/div>\n
\n
ISBN:<\/strong> 978-966-360-549-4<\/div>\n<\/div>\n
\n
\u041c\u043e\u0432\u0430:<\/strong>\u00a0\u0423\u043a\u0440\u0430\u0457\u043d\u0441\u044c\u043a\u0430<\/div>\n<\/div>\n
\n
\u0412\u0438\u0434\u0430\u0432\u0435\u0446\u044c:<\/strong>\u00a0\u0412\u0414 \u201c\u0410\u043a\u0430\u0434\u0435\u043c\u043f\u0435\u0440\u0456\u043e\u0434\u0438\u043a\u0430\u201d<\/div>\n<\/div>\n
\n
\u041c\u0456\u0441\u0446\u0435:<\/strong>\u00a0\u041a\u0438\u0457\u0432<\/div>\n<\/div>\n
\n

DOI: <\/strong>https:\/\/doi.org\/10.15407\/akademperiodyka.549.174<\/a><\/p>\n

\n<\/div>\n
\n

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\n

\u041b\u0456\u0442\u0435\u0440\u0430\u0442\u0443\u0440\u0430:<\/strong><\/p>\n

    \n
  1. \u0414\u043e\u0441\u0442\u0430\u043d\u043a\u043e \u0410.\u041f., \u0417\u0430\u043b\u0435\u0441\u0441\u043a\u0438\u0439 \u0412.\u0413., \u0420\u0443\u0441\u0435\u0446\u043a\u0438\u0439 \u0410.\u041c. \u0422\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u044b \u0438 \u0441\u0438\u0441\u0442\u0435\u043c\u044b \u0432 \u043c\u0438\u043a\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0438\u043a\u0435: \u043f\u043b\u0430\u0437\u043c\u0435\u043d\u043d\u044b\u0435, \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u043e-\u0438\u043e\u043d\u043d\u043e-\u043b\u0443\u0447\u0435\u0432\u044b\u0435, \u0443\u043b\u044c\u0442\u0440\u0430\u0437\u0432\u0443\u043a\u043e\u0432\u044b\u0435. \u041c\u0438\u043d\u0441\u043a: \u0411\u0435\u0441\u0442\u043f\u0440\u0438\u043d\u0442, 2009. 199 \u0441.<\/li>\n
  2. \u0411\u0435\u0440\u043b\u0438\u043d \u0415.\u0412., \u0421\u0435\u0439\u0434\u043c\u0430\u043d \u041b.\u0410. \u0418\u043e\u043d\u043d\u043e-\u043f\u043b\u0430\u0437\u043c\u0435\u043d\u043d\u044b\u0435 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u044b \u0432 \u0442\u043e\u043d\u043a\u043e\u043f\u043b\u0435\u043d\u043e\u0447\u043d\u043e\u0439 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438. \u041c\u043e\u0441\u043a\u0432\u0430: \u0422\u0435\u0445\u043d\u043e\u0441\u0444\u0435\u0440\u0430, 2010. 528 \u0441.<\/li>\n
  3. \u0410\u043d\u0434\u0440\u0435\u0435\u0432 \u0410.\u0410., \u0421\u0430\u0431\u043b\u0435\u0432 \u0412.\u041f., \u0428\u0443\u043b\u0430\u0435\u0432 \u0412.\u041c., \u0413\u0440\u0438\u0433\u043e\u0440\u044c\u0435\u0432 \u0421.\u041d. \u0412\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u044b\u0435 \u0443\u0441\u0442\u0440\u043e\u0439\u0441\u0442\u0432\u0430 \u0438 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f. \u0425\u0430\u0440\u044c\u043a\u043e\u0432: \u041d\u041d\u0426 \u0425\u0424\u0422\u0418, 2005. 278 \u0441.<\/li>\n
  4. \u0410\u043a\u0441\u0435\u043d\u043e\u0432 \u0418.\u0418., \u0410\u043d\u0434\u0440\u0435\u0435\u0432 \u0410.\u0410., \u0411\u0435\u043b\u043e\u0443\u0441 \u0412.\u0410., \u0421\u0442\u0440\u0435\u043b\u044c\u043d\u0438\u0446\u043a\u0438\u0439 \u0412.\u0415., \u0425\u043e\u0440\u043e\u0448\u0438\u0445 \u0412.\u041c. \u0412\u0430\u043a\u0443\u0443\u043c\u043d\u0430\u044f \u0434\u0443\u0433\u0430. \u0418\u0441\u0442\u043e\u0447\u043d\u0438\u043a\u0438 \u043f\u043b\u0430\u0437\u043c\u044b, \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u0435 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439, \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u043d\u043e\u0435 \u043c\u043e\u0434\u0438\u0444\u0438\u0446\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u0435. \u041a\u0438\u0435\u0432: \u041d\u0430\u0443\u043a\u043e\u0432\u0430 \u0434\u0443\u043c\u043a\u0430, 2012. 726 c.<\/li>\n
  5. \u041c\u0430\u0446\u0435\u0432\u0438\u0442\u044b\u0439 \u0412.\u041c. \u041f\u043e\u043a\u0440\u044b\u0442\u0438\u044f \u0434\u043b\u044f \u0440\u0435\u0436\u0443\u0449\u0438\u0445 \u0438\u043d\u0441\u0442\u0440\u0443\u043c\u0435\u043d\u0442\u043e\u0432. \u0425\u0430\u0440\u044c\u043a\u043e\u0432: \u0412\u0438\u0449\u0430 \u0448\u043a\u043e\u043b\u0430, 1987. 127 \u0441.<\/li>\n
  6. \u0412\u0435\u0440\u0435\u0449\u0430\u043a\u0430 \u0410.\u0421. \u0420\u0430\u0431\u043e\u0442\u043e\u0441\u043f\u043e\u0441\u043e\u0431\u043d\u043e\u0441\u0442\u044c \u0440\u0435\u0436\u0443\u0449\u0435\u0433\u043e \u0438\u043d\u0441\u0442\u0440\u0443\u043c\u0435\u043d\u0442\u0430 \u0441 \u0438\u0437\u043d\u043e\u0441\u043e\u0441\u0442\u043e\u0439\u043a\u0438\u043c\u0438 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f\u043c\u0438. \u041c\u043e\u0441\u043a\u0432\u0430: \u041c\u0430\u0448\u0438\u043d\u043e\u0441\u0442\u0440\u043e\u0435\u043d\u0438\u0435, 1993. 336 \u0441.<\/li>\n
  7. \u0411\u0435\u0440\u0435\u0441\u043d\u0435\u0432 \u0412.\u041c., \u041f\u043e\u0433\u0440\u0435\u0431\u043d\u044f\u043a \u0410.\u0414., \u0410\u0437\u0430\u0440\u0435\u043d\u043a\u043e\u0432 \u041d.\u0410., \u041a\u0438\u0440\u0438\u043a \u0413.\u0412. \u0421\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u0430, \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430 \u0438 \u043f\u043e\u043b\u0443\u0447\u0435\u043d\u0438\u0435 \u0442\u0432\u0435\u0440\u0434\u044b\u0445 \u043d\u0430\u043d\u043e\u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u0438 \u0447\u0435\u0441\u043a\u0438\u0445 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439, \u043e\u0441\u0430\u0436\u0434\u0430\u0435\u043c\u044b\u0445 \u043d\u0435\u0441\u043a\u043e\u043b\u044c\u043a\u0438\u043c\u0438 \u0441\u043f\u043e\u0441\u043e\u0431\u0430\u043c\u0438. \u0423\u0441\u043f\u0435\u0445\u0438 \u0444\u0438\u0437\u0438\u043a\u0438 \u043c\u0435\u0442\u0430\u043b\u043b\u043e\u0432. 2007. \u0422. 8, \u2116 3. \u0421. 171\u2014246. https:\/\/doi.org\/10.15407\/ufm.08.03.171<\/a><\/li>\n<\/ol>\n
      \n
    1. \u041f\u043e\u0433\u0440\u0435\u0431\u043d\u044f\u043a \u0410.\u0414., \u0428\u043f\u0430\u043a \u0410.\u041f., \u0410\u0437\u0430\u0440\u0435\u043d\u043a\u043e\u0432 \u041d.\u0410., \u0411\u0435\u0440\u0435\u0441\u043d\u0435\u0432 \u0412.\u041c. \u0421\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u0430 \u0438 \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430 \u0442\u0432\u0435\u0440\u0434\u044b\u0445 \u0438 \u0441\u0432\u0435\u0440\u0445\u0442\u0432\u0435\u0440\u0434\u044b\u0445 \u043d\u0430\u043d\u043e\u043a\u043e\u043c\u043f\u043e\u0437\u0438\u0442\u043d\u044b\u0445 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439. \u0423\u0441\u043f\u0435\u0445\u0438 \u0444\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u043d\u0430\u0443\u043a. 2009. \u0422. 179, \u2116 1. \u0421. 36\u201464. https:\/\/doi.org\/10.3367\/UFNe.0179.200901b.0035<\/a><\/li>\n
    2. Pogrebnjak A.D., Ivasishin O.M, Beresnev V.M. Arc-evaporated nanoscale multilayer nitride-based coatings for protection against wear, corrosion, and oxidation. \u0423\u0441\u043f\u0435\u0445\u0438 \u0444\u0438\u0437\u0438\u043a\u0438 \u043c\u0435\u0442\u0430\u043b\u043b\u043e\u0432. 2016. \u0422. 17, \u2116 1. C. 1\u201428. https:\/\/doi.org\/10.15407\/ufm.17.01.001<\/a><\/li>\n
    3. \u0411\u0435\u0440\u043b\u0438\u043d \u0415.\u0412., \u0421\u0435\u0439\u0434\u043c\u0430\u043d \u041b.\u0410. \u041f\u043e\u043b\u0443\u0447\u0435\u043d\u0438\u0435 \u0442\u043e\u043d\u043a\u0438\u0445 \u043f\u043b\u0435\u043d\u043e\u043a \u0440\u0435\u0430\u043a\u0442\u0438\u0432\u043d\u044b\u043c \u043c\u0430\u0433\u043d\u0435\u0442\u0440\u043e\u043d\u043d\u044b\u043c \u0440\u0430\u0441\u043f\u044b\u043b\u0435\u043d\u0438\u0435\u043c. \u041c\u043e\u0441\u043a\u0432\u0430: \u0422\u0435\u0445\u043d\u043e\u0441\u0444\u0435\u0440\u0430, 2014. 256 c.<\/li>\n
    4. Kelly P.J., Arnell R.D. Magnetron sputtering: a review of recent developments and applications. Vacuum. 2000. Vol. 56, No. 3. P. 159\u2014172. https:\/\/doi.org\/10.1016\/S0042-207X(99)00189-X<\/a><\/li>\n
    5. \u0421\u0432\u0430\u0434\u043a\u043e\u0432\u0441\u043a\u0438\u0439 \u0418.\u0412. \u041d\u0430\u043f\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u0440\u0430\u0437\u0432\u0438\u0442\u0438\u044f \u043c\u0430\u0433\u043d\u0435\u0442\u0440\u043e\u043d\u043d\u044b\u0445 \u0440\u0430\u0441\u043f\u044b\u043b\u0438\u0442\u0435\u043b\u044c\u043d\u044b\u0445 \u0441\u0438\u0441\u0442\u0435\u043c. \u0414\u043e\u043a\u043b\u0430\u0434\u044b \u0411\u0435\u043b\u043e\u0440\u0443\u0441\u0441\u043a\u043e\u0433\u043e \u0433\u043e\u0441\u0443\u0434\u0430\u0440\u0441\u0442\u0432\u0435\u043d\u043d\u043e\u0433\u043e \u0443\u043d\u0438\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442\u0430 \u0438\u043d\u0444\u043e\u0440\u043c\u0430\u0442\u0438\u043a\u0438 \u0438 \u0440\u0430\u0434\u0438\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0438\u043a\u0438. 2007. \u2116 2. \u0421. 112\u2014121.<\/li>\n
    6. Beresnev V.M., Torianyk I.M., Sobol\u2019 O.V., Pogrebnyak A.D., Kropotov A.Yu., Stervoedov N.G., Nyemchenko U.S., Kolesnikov D.A., Klimenko S.A., Turbin P.V. A lNTiB2-TiSi2 coatings obtained by pulsed magnetron sputtering. Technical Physics. 2014. Vol. 59, No. 8. P. 1220\u20141223. https:\/\/doi.org\/10.1134\/S1063784214080052<\/a><\/li>\n<\/ol>\n
        \n
      1. \u0414\u0430\u043d\u0438\u043b\u0438\u043d \u0411.\u0421. \u041f\u0440\u0438\u043c\u0435\u043d\u0435\u043d\u0438\u0435 \u043d\u0438\u0437\u043a\u043e\u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u043d\u043e\u0439 \u043f\u043b\u0430\u0437\u043c\u044b \u0434\u043b\u044f \u043d\u0430\u043d\u0435\u0441\u0435\u043d\u0438\u044f \u0442\u043e\u043d\u043a\u0438\u0445 \u043f\u043b\u0435\u043d\u043e\u043a. \u041c\u043e\u0441\u043a\u0432\u0430: \u042d\u043d\u0435\u0440\u0433\u043e\u0430\u0442\u043e\u043c\u0438\u0437\u0434\u0430\u0442, 1989. 328 \u0441.<\/li>\n
      2. \u041a\u0443\u0437\u043c\u0438\u0447\u0435\u0432 \u0410.\u0418. \u041c\u0430\u0433\u043d\u0435\u0442\u0440\u043e\u043d\u043d\u044b\u0435 \u0440\u0430\u0441\u043f\u044b\u043b\u0438\u0442\u0435\u043b\u044c\u043d\u044b\u0435 \u0441\u0438\u0441\u0442\u0435\u043c\u044b: \u0432 2 \u043a\u043d. \u041a\u0438\u0435\u0432: \u0410\u0432\u0435\u0440\u0441, 2008. \u041a\u043d. 1. \u0412\u0432\u0435\u0434\u0435\u043d\u0438\u0435 \u0432 \u0444\u0438\u0437\u0438\u043a\u0443 \u0438 \u0442\u0435\u0445\u043d\u0438\u043a\u0443 \u043c\u0430\u0433\u043d\u0435\u0442\u0440\u043e\u043d\u043d\u043e\u0433\u043e \u0440\u0430\u0441\u043f\u044b\u043b\u0435\u043d\u0438\u044f. 244 \u0441.<\/li>\n
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          1. \u041d\u0438\u043a\u0438\u0442\u0438\u043d \u041c.\u041c. \u041c\u0430\u0433\u043d\u0435\u0442\u0440\u043e\u043d\u043d\u043e\u0435 \u0440\u0430\u0441\u043f\u044b\u043b\u0435\u043d\u0438\u0435: \u044d\u0432\u043e\u043b\u044e\u0446\u0438\u044f \u0441\u0445\u0435\u043c \u043d\u0430\u043f\u044b\u043b\u0435\u043d\u0438\u044f. \u0424\u0438\u0437\u0438\u043a\u0430 \u0438 \u0445\u0438\u043c\u0438\u044f \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0438 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u043e\u0432. 2011. \u2116 2. \u0421. 27\u201436.<\/li>\n
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                      \n
                    1. \u0424\u0430\u0440\u0435\u043d\u0438\u043a \u0412.\u0418. \u041c\u0430\u043b\u043e\u044d\u043d\u0435\u0440\u0433\u043e\u0435\u043c\u043a\u0438\u0435 \u0443\u0441\u0442\u0440\u043e\u0439\u0441\u0442\u0432\u0430 \u0438\u043e\u043d\u043d\u043e-\u043f\u043b\u0430\u0437\u043c\u0435\u043d\u043d\u044b\u0445 \u043d\u0430\u043d\u043e\u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0439. \u0422\u0440\u0443\u0434\u044b \u043d\u0430\u0443\u0447\u043d\u043e-\u0442\u0435\u0445\u043d\u0438\u0447\u0435\u0441\u043a\u043e\u0439 \u043a\u043e\u043d\u0444\u0435\u0440\u0435\u043d\u0446\u0438\u0438. \u0425\u0430\u0440\u044c\u043a\u043e\u0432: \u0425\u041d\u0423 \u0438\u043c\u0435\u043d\u0438 \u0412.\u041d. \u041a\u0430\u0440\u0430\u0437\u0438\u043d\u0430, 2010. \u0427. 2. \u0421. 260\u2014263.<\/li>\n
                    2. \u041c\u0430\u0437\u0456\u043b\u0456\u043d \u0411.\u041e. \u0421\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u0430 \u0442\u0430 \u043c\u0435\u0445\u0430\u043d\u0456\u0447\u043d\u0456 \u0432\u043b\u0430\u0441\u0442\u0438\u0432\u043e\u0441\u0442\u0456 \u043a\u043e\u043c\u0431\u0456\u043d\u043e\u0432\u0430\u043d\u0438\u0445 \u043d\u0430\u043d\u043e\u043a\u043e\u043c\u043f\u043e\u0437\u0438\u0442\u043d\u0438\u0445 \u043f\u043e\u043a\u0440\u0438\u0442\u0442\u0456\u0432 \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0456 \u043a\u0435\u0440\u0430\u043c\u0456\u0447\u043d\u0438\u0445 \u043c\u0430\u0442\u0435\u0440\u0456\u0430\u043b\u0456\u0432: \u0434\u0438\u0441. … \u0434\u043e\u043a\u0442. \u0444\u0456\u043b\u043e\u0441\u043e\u0444\u0456\u0457: 105. \u0425\u0430\u0440\u043a\u0456\u0432. 2021. 202 c.<\/li>\n
                    3. \u041c\u0435\u0441\u044f\u0446 \u0413.\u0410. \u042d\u043a\u0442\u043e\u043d\u044b \u0432 \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e\u043c \u0434\u0443\u0433\u043e\u0432\u043e\u043c \u0440\u0430\u0437\u0440\u044f\u0434\u0435: \u043f\u0440\u043e\u0431\u043e\u0439, \u0438\u0441\u043a\u0440\u0430, \u0434\u0443\u0433\u0430. \u041c\u043e\u0441\u043a\u0432\u0430: \u041d\u0430\u0443\u043a\u0430, 2004. 424 \u0441.<\/li>\n
                    4. \u0410\u043a\u0441\u0451\u043d\u043e\u0432 \u0418.\u0418., \u0411\u0435\u043b\u043e\u0443\u0441 \u0412.\u0410., \u041f\u0430\u0434\u0430\u043b\u043a\u0430 \u0412.\u0413., \u0425\u043e\u0440\u043e\u0448\u0438\u0445 \u0412.\u041c. \u0422\u0440\u0430\u043d\u0441\u043f\u043e\u0440\u0442\u0438\u0440\u043e\u0432\u043a\u0430 \u043f\u043b\u0430\u0437\u043c\u0435\u043d\u043d\u044b\u0445 \u043f\u043e\u0442\u043e\u043a\u043e\u0432 \u0432 \u043a\u0440\u0438\u0432\u043e\u043b\u0438\u043d\u0435\u0439\u043d\u043e\u0439 \u043f\u043b\u0430\u0437\u043c\u043e\u043e\u043f\u0442\u0438\u0447\u0435\u0441\u043a\u043e\u0439 \u0441\u0438\u0441\u0442\u0435\u043c\u0435. \u0424\u0438\u0437\u0438\u043a\u0430 \u043f\u043b\u0430\u0437\u043c\u044b. 1978. \u0422. 4, \u2116 4. \u0421. 758\u2014763.<\/li>\n<\/ol>\n
                        \n
                      1. \u0410\u043a\u0441\u0435\u043d\u043e\u0432 \u0418.\u0418., \u0410\u043a\u0441\u0435\u043d\u043e\u0432 \u0414.\u0421., \u0412\u0430\u0441\u0438\u043b\u044c\u0435\u0432 \u0412.\u0412., \u041b\u0443\u0447\u0430\u043d\u0438\u043d\u043e\u0432 \u0410.\u0410., \u041e\u043c\u0430\u0440\u043e\u0432 \u0410.\u041e., \u0421\u0442\u0440\u0435\u043b\u044c\u043d\u0438\u0446\u043a\u0438\u0439 \u0412.\u0415. \u0424\u043e\u0440\u043c\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u0435 \u043f\u043e\u0442\u043e\u043a\u043e\u0432 \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u043e\u0439 \u043f\u043b\u0430\u0437\u043c\u044b \u0438\u0441\u0442\u043e\u0447\u043d\u0438\u043a\u0430\u043c\u0438 \u0441 \u0448\u0438\u0440\u043e\u043a\u043e\u0430\u043f\u0435\u0440\u0442\u0443\u0440\u043d\u044b\u043c \u0444\u0438\u043b\u044c\u0442\u0440\u043e\u043c. \u0412\u0456\u0441\u043d\u0438\u043a \u0425\u0430\u0440\u043a\u0456\u0432\u0441\u044c\u043a\u043e\u0433\u043e \u043d\u0430\u0446. \u0443\u043d-\u0442\u0443. \u0421\u0435\u0440.\u0444\u0456\u0437. \u042f\u0434\u0440\u0430, \u0447\u0430\u0441\u0442\u0438\u043d\u043a\u0438, \u043f\u043e\u043b\u044f. 2008. \u0422. 794, \u2116 1. C. 3\u201420.<\/li>\n<\/ol>\n
                          \n
                        1. \u0410\u043a\u0441\u0435\u043d\u043e\u0432 \u0414.\u0410., \u0410\u043a\u0441\u0435\u043d\u043e\u0432 \u0418.\u0418., \u0421\u0442\u0440\u0435\u043b\u044c\u043d\u0438\u0446\u043a\u0438\u0439 \u0412.\u0415. \u0412\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u044b\u0435 \u0438\u0441\u0442\u043e\u0447\u043d\u0438\u043a\u0438 \u044d\u0440\u043e\u0437\u0438\u043e\u043d\u043d\u043e\u0439 \u043f\u043b\u0430\u0437\u043c\u044b \u0441 \u043c\u0430\u0433\u043d\u0438\u0442\u043d\u044b\u043c\u0438 \u0444\u0438\u043b\u044c\u0442\u0440\u0430\u043c\u0438: \u043e\u0431\u0437\u043e\u0440. \u0412\u043e\u043f\u0440\u043e\u0441\u044b \u0430\u0442\u043e\u043c\u043d\u043e\u0439 \u043d\u0430\u0443\u043a\u0438 \u0438 \u0442\u0435\u0445\u043d\u0438\u043a\u0438. 2007. \u0422. 90, \u2116 2. \u0421. 190\u2014203.<\/li>\n<\/ol>\n
                            \n
                          1. Aksenov I.I., Khoroshikh V.M. Filtering shields in vacuum arc plasma sourses. In: Trends and New Application of Thin Films: Proc. of the 6th Int. Symp. Regensburg, 1998. \u0420. 283\u2014286.<\/li>\n
                          2. Aksenov I.I., Belous V.A., Vasil\u2019ev V.V., Volkov Yu.Ya., Strel\u2019nitskij V.E. A rectilinear plasma filtering system for vacuum-arc deposition of diamond-like carbon coatings. Diamond and Related Mater. 1999. Vol. 8. P. 468\u2013471. https:\/\/doi.org\/10.1016\/S0925-9635(98)00402-6<\/a><\/li>\n<\/ol>\n
                              \n
                            1. Kleiman A., Marques A., Boxman R.L. Performance of a magnetic island macroparticle filter in a titanium vacuum arc. Plasma Sources Science and Technology. 2008. Vol. 17. P. 015008. https:\/\/doi.org\/10.1088\/0963-0252\/17\/1\/015008<\/a><\/li>\n
                            2. \u041f\u0430\u0442\u0435\u043d\u0442 \u0420\u0424 \u2116 2011136514\/02. \u0421\u043f\u043e\u0441\u043e\u0431 \u0442\u0440\u0430\u043d\u0441\u043f\u043e\u0440\u0442\u0438\u0440\u043e\u0432\u043a\u0438 \u0441 \u0444\u0438\u043b\u044c\u0442\u0440\u043e\u0432\u0430\u043d\u0438\u0435\u043c \u043e\u0442 \u043c\u0430\u043a\u0440\u043e\u0447\u0430\u0441\u0442\u0438\u0446 \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u043e\u0439 \u043a\u0430\u0442\u043e\u0434\u043d\u043e\u0439 \u043f\u043b\u0430\u0437\u043c\u044b \u0438 \u0443\u0441\u0442\u0440\u043e\u0439\u0441\u0442\u0432\u043e \u0434\u043b\u044f \u0435\u0433\u043e \u043e\u0441\u0443\u0449\u0435\u0441\u0442\u0432\u043b\u0435\u043d\u0438\u044f. \u0417\u0430\u044f\u0432\u043b. 0.1.09.2011; \u043e\u043f\u0443\u0431\u043b. 10.03.2013. \u0411\u044e\u043b. \u2116 7.<\/li>\n
                            3. \u041f\u0430\u0442\u0435\u043d\u0442 \u0423\u043a\u0440\u0430\u0457\u043d\u0438 \u2116 97584. \u0421\u043f\u043e\u0441\u0456\u0431 \u0442\u0440\u0430\u043d\u0441\u043f\u043e\u0440\u0442\u0443\u0432\u0430\u043d\u043d\u044f \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u043e\u0457 \u043a\u0430\u0442\u043e\u0434\u043d\u043e\u0457 \u043f\u043b\u0430\u0437\u043c\u0438 \u0456\u0437 \u0444\u0456\u043b\u044c\u0442\u0440\u0443\u0432\u0430\u043d\u043d\u044f\u043c \u0432\u0456\u0434 \u043c\u0430\u043a\u0440\u043e\u0447\u0430\u0441\u0442\u043e\u043a \u0456 \u043f\u0440\u0438\u0441\u0442\u0440\u0456\u0439 \u0434\u043b\u044f \u0439\u043e\u0433\u043e \u0437\u0434\u0456\u0439\u0441\u043d\u0435\u043d\u043d\u044f. \u0417\u0430\u044f\u0432\u043b. 08.11.2010; \u043e\u043f\u0443\u0431\u043b. 27.02.2012. \u0411\u044e\u043b. \u2116 4.<\/li>\n
                            4. \u0412\u0430\u0441\u0438\u043b\u044c\u0454\u0432 \u0412.\u0412. \u0421\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u0430 \u0442\u0430 \u0432\u043b\u0430\u0441\u0442\u0438\u0432\u043e\u0441\u0442\u0456 \u043f\u043e\u043a\u0440\u0438\u0442\u0442\u0456\u0432 Ti-N,Ti-Al-N, Ti-Al-Y-N, \u043e\u0441\u0430\u0434 \u0436\u0435\u043d\u0438\u0445 \u0437 \u0432\u0438\u0441\u043e\u043a\u043e\u043f\u0440\u043e\u0434\u0443\u043a\u0442\u0438\u0432\u043d\u043e\u0433\u043e \u0434\u0436\u0435\u0440\u0435\u043b\u0430 \u0444\u0456\u043b\u044c\u0442\u0440\u043e\u0432\u0430\u043d\u043e\u0457 \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u043e\u0457 \u043f\u043b\u0430\u0437\u043c\u0438. \u0430\u0432\u0442\u043e\u0440\u0435\u0444. \u0434\u0438\u0441. … \u043a\u0430\u043d\u0434. \u0442\u0435\u0445\u043d. \u043d\u0430\u0443\u043a: 01.04.07. \u0425\u0430\u0440\u043a\u0456\u0432, 2016. 22 \u0441.<\/li>\n
                            5. Vasylyev V.V., Luchaninov \u0410.\u0410., Strelnitsrij V \u0415. High-productive source of the cathodic vacuum-arc plasma with the rectilinear filter. Problems of Atomic Science and Technology. 2014. \u0422. 89, \u2116 1. \u0420. 97\u2014100.<\/li>\n
                            6. \u0410\u043d\u0434\u0440\u0435\u0435\u0432 \u0410.\u0410., \u0421\u0430\u0431\u043b\u0435\u0432 \u041b.\u041f., \u0413\u0440\u0438\u0433\u043e\u0440\u044c\u0435\u0432 \u0421.\u041d. \u0412\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u044b\u0435 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f. \u0425\u0430\u0440\u044c\u043a\u043e\u0432: \u041d\u041d\u0426 \u0425\u0424\u0422\u0418, 2010. 317 \u0441.<\/li>\n
                            7. Pilletier J., Anders A. Plasma-based ion implantation and deposition: A review of physics, technology and applications. IEEE Transact. on Plasma Sci. 2005. Vol. 33, No. 6. P. 1944\u20141959. https:\/\/doi.org\/10.1109\/TPS.2005.860079<\/a><\/li>\n
                            8. Perry A.J., Treglio J.R., Tian A.F. Low-temperature deposition of titanium nitride. Surface and Coatings Technology. 1995. Vol. 76\u201377. P. 815\u2014820. https:\/\/doi.org\/10.1016\/0257-8972(95)02628-2<\/a><\/li>\n
                            9. Beresnev V.M., Gritsenko V.I., Tolok V.T., Shvets O.M. Hight-freguency charged gas plasma activation of material surface in process of coating. In: Modification of Properties of Surface Layers MPSL: Proc. Int. Conf. Sumy, 1993. \u0420. 44\u201445.<\/li>\n<\/ol>\n
                                \n
                              1. \u0413\u0440\u0438\u0446\u0435\u043d\u043a\u043e \u0412.\u0418., \u0411\u0435\u0440\u0435\u0441\u043d\u0435\u0432 \u0412.\u041c., \u0428\u0432\u0435\u0446 \u041e.\u041c. \u0418\u0441\u043f\u043e\u043b\u044c\u0437\u043e\u0432\u0430\u043d \u0438\u0435 \u0412\u0427 \u0440\u0430\u0437\u0440\u044f\u0434\u0430 \u0432 \u043c\u0435\u0442\u043e\u0434\u0435 \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u043e\u0433\u043e \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u044f \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439. \u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0430\u044f \u0438\u043d\u0436\u0435\u043d\u0435\u0440\u0438\u044f \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u0438. 2003. \u0422. 1, \u2116 1. \u0421. 37\u201444.<\/li>\n<\/ol>\n
                                  \n
                                1. \u0411\u0435\u0440\u0435\u0441\u043d\u0435\u0432 \u0412.\u041c., \u0428\u0432\u0435\u0446 \u041e.\u041c., \u0411\u0435\u043b\u044f\u0435\u0432\u0430 \u0422.\u041d. \u041e\u0441\u043e\u0431\u0435\u043d\u043d\u043e\u0441\u0442\u0438 \u0432\u0432\u043e\u0434\u0430 \u0432\u044b\u0441\u043e\u043a\u043e\u0447\u0430\u0441\u0442\u043e\u0442\u043d\u043e\u0439 \u044d\u043d\u0435\u0440\u0433\u0438\u0438 \u0432 \u043f\u043e\u0442\u043e\u043a \u0435 \u043f\u043b\u0430\u0437\u043c\u044b. \u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0430\u044f \u0438\u043d\u0436\u0435\u043d\u0435\u0440\u0438\u044f \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u0438. 2005. \u0422. 3, \u2116 1\u20142. \u0421. 71\u201473.<\/li>\n
                                2. \u041f\u0430\u0442\u0435\u043d\u0442 \u0423\u043a\u0440\u0430\u0457\u043d\u0438 \u2116 2363. \u0423\u0441\u0442\u0440\u043e\u0439\u0441\u0442\u0432\u043e \u0434\u043b\u044f \u043d\u0430\u043d\u0435\u0441\u0435\u043d\u0438\u044f \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439 \u0432 \u0432\u0430\u043a\u0443\u0443\u043c\u0435. \u0417\u0430\u044f\u0432\u043b. 11.05.90; \u043e\u043f\u0443\u0431\u043b. 15.07.94. \u0411\u044e\u043b. \u2116 13.<\/li>\n
                                3. \u0428\u0432\u0435\u0446 \u041e.\u041c., \u0411\u0435\u0440\u0435\u0441\u043d\u0435\u0432 \u0412.\u041c., \u0422\u0443\u0440\u0431\u0438 \u043d \u041f.\u0412., \u0413\u0440\u0443\u0434\u043d\u0438\u0446\u043a\u0438\u0439 \u0412.\u0412., \u041d\u0435\u043c\u0447\u0435\u043d\u043a\u043e \u0423.\u0421., \u041a\u043e\u043b\u0435\u0441\u043d\u0438\u043a\u043e\u0432 \u0414.\u0410. \u041f\u0440\u0438\u043c\u0435\u043d\u0435\u043d\u0438\u0435 \u0438\u043c\u043f\u0443\u043b\u044c\u0441\u043d\u043e\u0433\u043e \u0412\u0427 \u0433\u0435\u043d\u0435\u0440\u0430\u0442\u043e\u0440\u0430 \u0441 \u0443\u0434\u0430\u0440\u043d\u044b\u043c \u043a\u043e\u043d\u0442\u0443\u0440\u043e\u043c \u0432 \u043c\u0435\u0442\u043e\u0434\u0435 \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u043e\u0433\u043e \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u044f \u043f\u0440\u0438 \u0441\u0438\u043d\u0442\u0435\u0437\u0435 \u043d\u0430\u043d\u043e\u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u044b\u0445 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439. \u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0430\u044f \u0438\u043d\u0436\u0435\u043d\u0435\u0440\u0438\u044f \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u0438. 2011 . \u0422. 9, \u2116 1. \u0421. 32\u201439.<\/li>\n
                                4. Koehler J.S. Attempt to design a strong solid. Physics Review. B. 1970. Vol. 2. \u0420. 547\u2014551. https:\/\/doi.org\/10.1103\/PhysRevB.2.547<\/a><\/li>\n
                                5. Holleck H., Schier V. Multilayer PVD coatings for wear protection. Surface and Coatings Technology. 1995. Vol. 76\u201477, No. 1. P. 328\u2014336. https:\/\/doi.org\/10.1016\/0257-8972(95)02555-3<\/a><\/li>\n
                                6. \u0420\u0443\u0434\u0435\u043d\u043a\u043e \u0412.\u041f., \u0421\u0442\u043e\u043b\u0431\u043e\u0432\u043e\u0439 \u0412.\u0410., \u0421\u0435\u0440\u0434\u044e\u043a \u0418.\u0412., \u041a\u0430\u0440\u0442\u043c\u0430\u0437\u043e\u0432 \u041a.\u0413. \u0421\u0438\u0441\u0442\u0435\u043c\u0430 \u0443\u043f\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u043d\u0430\u043d\u0435\u0441\u0435\u043d\u0438\u0435\u043c \u0441\u0432\u0435\u0440\u0445\u0442\u0432\u0435\u0440\u0434\u044b\u0445 \u043d\u0430\u043d\u043e\u0441\u043b\u043e\u0439\u043d\u044b\u0445 \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u044b\u0445 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439. \u0412\u043e\u0441\u0442\u043e\u0447\u043d\u043e-\u0435\u0432\u0440\u043e\u043f\u0435\u0439\u0441\u043a\u0438\u0439 \u0436\u0443\u0440\u043d\u0430\u043b \u043f\u0435\u0440\u0435\u0434\u043e\u0432\u044b\u0445 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0439. 2010. \u0422. 6\/1. \u0421. 66\u201469.<\/li>\n<\/ol>\n
                                    \n
                                  1. \u0421\u0442\u043e\u043b\u0431\u043e\u0432\u043e\u0439 \u0412.\u041e. \u0424\u0456\u0437\u0438\u043a\u043e-\u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0456\u0447\u043d\u0456 \u043e\u0441\u043d\u043e\u0432\u0438 \u0444\u043e\u0440\u043c\u0443\u0432\u0430\u043d\u043d\u044f \u0431\u0430\u0433\u0430\u0442\u043e\u0448\u0430\u0440\u043e\u0432\u0438\u0445 \u043d\u0430\u043d\u043e\u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u043d\u0438\u0445 \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u0438\u0445 \u043f\u043e\u043a\u0440\u0438\u0442\u0442\u0456\u0432 \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0456 \u043d\u0456\u0442\u0440\u0438\u0434\u0456\u0432 \u0442\u0443\u0433\u043e\u043f\u043b\u0430\u0432\u043a\u0438\u0445 \u043c\u0435\u0442\u0430\u043b\u0456\u0432: \u0434\u0438\u0441. … \u0434\u043e\u043a\u0442. \u0442\u0435\u0445\u043d. \u043d\u0430\u0443\u043a: 05.03.01. \u0425\u0430\u0440\u043a\u0456\u0432, 2021. 392 \u0441.<\/li>\n
                                  2. \u041d\u0430\u043d\u043e\u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u043d\u044b\u0435 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f. \u041f\u043e\u0434 \u0440\u0435\u0434. \u0410. \u041a\u0430\u0432\u0430\u043b\u0435\u0439\u0440\u043e, \u0414. \u0434\u0435 \u0425\u043e\u0441\u0441\u043e\u043d\u0430. \u041c\u043e\u0441\u043a\u0432\u0430: \u0422\u0435\u0445\u043d\u043e\u0441\u0444\u0435\u0440\u0430, 2011. 792 \u0441.<\/li>\n
                                  3. \u0410\u043d\u0434\u0440\u0438\u0435\u0432\u0441\u043a\u0438\u0439 \u0420.\u0410. \u0421\u0432\u0435\u0440\u0445\u0442\u0432\u0435\u0440\u0434\u044b\u0435 \u043d\u0430\u043d\u043e\u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u043d\u044b\u0435 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u044b \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0442\u0443\u0433\u043e\u043f\u043b\u0430\u0432\u043a\u0438\u0445 \u0441\u043e\u0435\u0434\u0438\u043d\u0435\u043d\u0438\u0439. \u0416\u0443\u0440\u043d\u0430\u043b \u0444\u0443\u043d\u043a\u0446\u0438\u043e\u043d\u0430\u043b\u044c\u043d\u0438\u0445 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u043e\u0432. 2007. T. 1, \u2116 4. C. 129\u2014133.<\/li>\n
                                  4. \u0410\u0437\u0430\u0440\u0435\u043d\u043a\u043e\u0432 \u041d.\u0410. \u0438 \u0434\u0440. \u041d\u0430\u043d\u043e\u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u044b, \u043d\u0430\u043d\u043e\u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f, \u043d\u0430\u043d\u043e\u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438: \u0443\u0447. \u043f\u043e\u0441\u043e\u0431\u0438\u0435. \u0425\u0430\u0440\u044c\u043a\u043e\u0432: \u0425\u041d\u0423 \u0438\u043c\u0435\u043d\u0438 \u0412.\u041d. \u041a\u0430\u0440\u0430\u0437\u0438\u043d\u0430, 2009. 209 \u0441.<\/li>\n
                                  5. Musil J. Hard and superhard nanocomposite coatings. Surface and Coatings Technology. 2000. Vol. 125, No. 1\u20143. P. 322\u2014330. https:\/\/doi.org\/10.1016\/S0257-8972(99)00586-1<\/a><\/li>\n
                                  6. \u0411\u0435\u0440\u0435\u0441\u043d\u0435\u0432 \u0412.\u041c., \u041f\u043e\u0433\u0440\u0435\u0431\u043d\u044f\u043a \u0410.\u0414., \u0410\u0437\u0430\u0440\u0435\u043d\u043a\u043e\u0432 \u041d.\u0410., \u0424\u0430\u0440\u0435\u043d\u0438\u043a \u0412.\u0418., \u041a\u0438\u0440\u0438\u043a \u0413.\u0412. \u041d\u0430\u043d\u043e\u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0438 \u043d\u0430\u043d\u043e\u043a\u043e\u043c\u043f\u043e\u0437\u0438\u0442\u043d\u044b\u0435 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f, \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u0430, \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430. \u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0430\u044f \u0438\u043d\u0436\u0435\u043d\u0435\u0440\u0438\u044f \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u0438. 2007. \u0422. 5, \u2116 1\u20142. \u0421. 4\u201428.<\/li>\n<\/ol>\n
                                      \n
                                    1. \u0411\u0435\u0440\u0435\u0441\u043d\u0435\u0432 \u0412.\u041c., \u0421\u043e\u0431\u043e\u043b\u044c \u041e.\u0412., \u041a\u043e\u043b\u0435\u0441\u043d\u0438\u043a\u043e\u0432 \u0414.\u0410., \u041a\u0438\u0440\u0438\u043a \u0413.\u0412., Muhammed A.K.M., \u0422\u0443\u0440\u0431\u0438\u043d \u041f.\u0412., \u0413\u0440\u0443\u0434\u043d\u0438\u0446\u043a\u0438\u0439 \u0412.\u0412., \u0422\u043e\u0440\u044f\u043d\u0438\u043a \u0418.\u041d., \u041d\u0435\u043c\u0447\u0435\u043d\u043a\u043e \u0423.\u0421. \u0424\u0438\u0437\u0438\u043a\u043e-\u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0438 \u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430 \u043d\u0430\u043d\u043e\u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u043d\u044b\u0445 \u043d\u0438\u0442\u0440\u0438\u0434\u043d\u044b\u0445 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439. \u041c\u0435\u0442\u0430\u043b\u043b\u043e\u0444\u0438\u0437\u0438\u043a\u0430 \u0438 \u043d\u043e\u0432\u0435\u0439\u0448\u0438\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438. 2012. \u0422. 34, \u2116 2. \u0421. 137\u2014158.<\/li>\n<\/ol>\n
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                                          \n
                                        1. \u0410\u0437\u0430\u0440\u0435\u043d\u043a\u043e\u0432 \u041d.\u0410., \u0411\u0435\u0440\u0435\u0441\u043d\u0435\u0432 \u0412.\u041c., \u041f\u043e\u0433\u0440\u0435\u0431\u043d\u044f\u043a \u0410.\u0414., \u041a\u043e\u043b\u0435\u0441\u043d\u0438\u043a\u043e\u0432 \u0414.\u0410. \u041d\u0430\u043d\u043e\u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u043d\u044b\u0435 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f \u0438 \u043d\u0430\u043d\u043e\u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u044b. \u041e\u0441\u043d\u043e\u0432\u044b \u043f\u043e\u043b\u0443\u0447\u0435\u043d\u0438\u044f, \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430, \u043e\u0431\u043b\u0430\u0441\u0442\u0438 \u043f\u0440\u0438\u043c\u0435\u043d\u0435\u043d\u0438\u044f. \u041c\u043e\u0441\u043a\u0432\u0430: \u041b\u0438\u0431\u0440\u0438\u043a\u043e\u043c, 2013. 368 \u0441.<\/li>\n
                                        2. \u0410\u043a\u0441\u0435\u043d\u043e\u0432 \u0418.\u0418. \u0438 \u0434\u0440. \u0412\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u044b\u0435 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f. \u0422\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u044f, \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u044b, \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u0430, \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430. \u0425\u0430\u0440\u044c\u043a\u043e\u0432: \u041d\u041d\u0426 \u0425\u0424\u0422\u0418, 2015. 379 \u0441.<\/li>\n<\/ol>\n
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                                                              1. \u0420\u0435\u0448\u0435\u0442\u043d\u044f\u043a \u0415.\u041d., \u0421\u0442\u0440\u0435\u043b\u044c\u043d\u0438\u0446\u043a\u0438\u0439 \u0412.\u0415. \u0421\u0438\u043d\u0442\u0435\u0437 \u0443\u043f\u0440\u043e\u0447\u043d\u044f\u044e\u0449\u0438\u0445 \u043d\u0430\u043d\u043e\u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u043d\u044b\u0445 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439. \u0412\u043e\u043f\u0440\u043e\u0441\u044b \u0430\u0442\u043e\u043c\u043d\u043e\u0439 \u043d\u0430\u0443\u043a\u0438 \u0438 \u0442\u0435\u0445\u043d\u0438\u043a\u0438. 2008. \u2116 2. \u0421. 119\u2014130.<\/li>\n<\/ol>\n
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                                                                    1. \u0410\u0437\u0430\u0440\u0435\u043d\u043a\u043e\u0432 \u041d.\u041e., \u041d\u0435\u043a\u043b\u044e\u0434\u043e\u0432 \u0406.\u041c., \u0411\u0435\u0440\u0435\u0441\u043d\u0454\u0432 \u0412.\u041c., \u0412\u043e\u0454\u0432\u043e\u0434\u0456\u043d \u0412.\u041c., \u041f\u043e\u0433\u0440\u0435\u0431\u043d\u044f\u043a \u041e.\u0414., \u041a\u043e\u0432\u0442\u0443\u043d \u0413.\u041f., \u0421\u043e\u0431\u043e\u0440\u043b\u044c \u041e.\u0412., \u0423\u0434\u043e\u0432\u0438\u0446\u044c\u043a\u0438\u0439 \u0412.\u0413., \u041b\u0438\u0442\u043e\u0432\u0447\u0435\u043d\u043a\u043e \u0421.\u0412., \u0422\u0443\u0440\u0431\u0456\u043d \u041f.\u0412., \u0427\u0438\u0448\u043a\u0430\u043b\u0430 \u0412.\u041e. \u041d\u0430\u043d\u043e\u043c\u0430\u0442\u0435\u0440\u0456\u0430\u043b\u0438 \u0456 \u043d\u0430\u043d\u043e\u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0456\u0457: \u043d\u0430\u0432\u0447. \u043f\u043e\u0441\u0456\u0431\u043d\u0438\u043a. \u0425\u0430\u0440\u044c\u043a\u043e\u0432: \u0425\u041d\u0423 \u0456\u043c\u0435\u043d\u0456 \u0412.\u041d. \u041a\u0430\u0440\u0430\u0437\u0456\u043d\u0430, 2014. 316 \u0441.<\/li>\n<\/ol>\n
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                                                                            2. \u0410\u0437\u0430\u0440\u0435\u043d\u043a\u043e\u0432 \u041d.\u0410., \u0411\u0435\u0440\u0435\u0441\u043d\u0435\u0432 \u0412.\u041c., \u041f\u043e\u0433\u0440\u0435\u0431\u043d\u044f\u043a \u0410.\u0414. \u0421\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u0430 \u0438 \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430 \u0437\u0430\u0449\u0438\u0442\u043d\u044b\u0445 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439 \u0438 \u043c\u043e\u0434\u0438\u0444\u0438\u0446\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u044b\u0445 \u0441\u043b\u043e\u0435\u0432 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u043e\u0432. \u0425\u0430\u0440\u044c\u043a\u043e\u0432: \u0425\u041d\u0423 \u0438\u043c\u0435\u043d\u0438 \u0412.\u041d. \u041a\u0430\u0440\u0430\u0437\u0438\u043d\u0430, 2007. 560 \u0441.<\/li>\n
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                                                                              2. Gretillat M.-A., Linder C., Dommann A., Staufert G., de Rooij N.F., Nicolet M.-A. Surface micromachined Ta-Si-N beams for use micromechanics. Journal of Micromechanics and Microengineering. 1998. Vo l. 8, No. 2. P. 88\u201490. https:\/\/doi.org\/10.1088\/0960-1317\/8\/2\/011<\/a><\/li>\n<\/ol>\n
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                                                                                      1. Pogrebnyak A.D., Sobol\u2019 O.V., Beresnev V.M., Turbin P.V., Dub S.N., Kirik G.V., Dmitrenko A.E. Features of the structural state and mechanical properties of ZrN and Zr(Ti)-Si-N coatings obtained by ion-plasma deposition technique. Technical Physics Letters. 2009. Vol. 35, No. 10. P. 925\u2014928. https:\/\/doi.org\/10.1134\/S1063785009100150<\/a><\/li>\n<\/ol>\n
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                                                                                            \n
                                                                                          1. \u041f\u043e\u0433\u0440\u0435\u0431\u043d\u044f\u043a \u0410.\u0414. \u0438 \u0434\u0440. \u0422\u0435\u0440\u043c\u0438\u0447\u0435\u0441\u043a\u0430\u044f \u0441\u0442\u0430\u0431\u0438\u043b\u044c\u043d\u043e\u0441\u0442\u044c, \u0444\u0430\u0437\u043e\u0432\u044b\u0439 \u0441\u043e\u0441\u0442\u0430\u0432, \u043d\u0430\u043f\u0440\u044f\u0436\u0435\u043d\u043d\u043e\u0435 \u0441\u043e\u0441\u0442\u043e\u044f\u043d\u0438\u0435 \u0432 \u0441\u0432\u0435\u0440\u0445\u0442\u0432\u0435\u0440\u0434\u044b\u0445 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f\u0445 Zr-Si-N, Zr-Si-N-Ti, \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u043d\u044b\u0445 \u0412\u0410\u0414-\u043c\u0435\u0442\u043e\u0434\u043e\u043c \u0441 \u0412\u0427-\u0440\u0430\u0437\u0440\u044f\u0434\u043e\u043c. \u0412 \u043a\u043d.: \u041f\u043b\u0435\u043d\u043a\u0438 \u0438 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f-2009: \u0442\u0440\u0443\u0434\u044b 9-\u0439 \u041c\u0435\u0436\u0434\u0443\u043d\u0430\u0440\u043e\u0434\u043d\u043e\u0439 \u043a\u043e\u043d\u0444\u0435\u0440\u0435\u043d\u0446\u0438\u0438. \u0421\u0430\u043d\u043a\u0442-\u041f\u0435\u0442\u0435\u0440\u0431\u0443\u0440\u0433, 2009. \u0421. 226\u2014229.<\/li>\n
                                                                                          2. C\u043e\u0431\u043e\u043b\u044c \u041e.\u0412., \u041f\u043e\u0433\u0440\u0435\u0431\u043d\u044f\u043a \u0410.\u0414., \u0411\u0435\u0440\u0435\u0441\u043d\u0435\u0432 \u0412.\u041c. \u0412\u043b\u0438\u044f\u043d\u0438\u0435 \u0443\u0441\u043b\u043e\u0432\u0438\u0439 \u043f\u043e\u043b\u0443\u0447\u0435\u043d\u0438\u044f \u043d\u0430 \u0444\u0430\u0437\u043e\u0432\u044b\u0439 \u0441\u043e\u0441\u0442\u0430\u0432, \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u0443 \u0438 \u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0445\u0430\u0440\u0430\u043a\u0442\u0435\u0440\u0438\u0441\u0442\u0438\u043a\u0438 \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u044b\u0445 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439 \u0441\u0438\u0441\u0442\u0435\u043c\u044b Zr-TI-Si-N. \u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0430\u044f \u043c\u0435\u0437\u043e\u043c\u0435\u0445\u0430\u043d\u0438\u043a\u0430. 2011. \u0422. 14, \u2116 4. \u0421. 199\u2014206.<\/li>\n
                                                                                          3. Kiryukhantsev-Korneev F.V., Petrzhik M.I., Sheveiko A.N., Levashov E.A., Shtanskii D.V. Effect of Al, Si, and Cr on the thermal stability and high\u2013temperature oxidation resistance of coatings based on titanium boronitride. The Physics of Metals and Metallography. 2007. Vol. 104. P. 167\u2014174. https:\/\/doi.org\/10.1134\/S0031918X07080091<\/a><\/li>\n
                                                                                          4. Shtansky D.V., Levashov E.A., Sheveiko A.N., Moore J.J. Optimization of PVD Parameters for the Deposition of Ultrahard Ti-Si-B-N Coatings. Journal of Materials Synthesis and Processing. 1999. Vol. 7, No. 3. P. 187\u2014193. https:\/\/doi.org\/10.1023\/A:1021873314381<\/a><\/li>\n<\/ol>\n
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                                                                                            1. Shansky D.V., Sheveiko A.N., Petrzhik M.I., Kiryukhantsev-Korneev F.V., Levashov E.A., Leyland A., Yerokhin A.L., Matthews A. Hard tribological Ti-B-N, Ti-Cr-B-N, Ti-Si-B-N and Ti-Al-Si-B-N coatings. Surface and Coatings Technology. 2005. Vol. 200, No. 1\u20144. P. 208\u2014212. https:\/\/doi.org\/10.1016\/j.surfcoat.2005.02.126<\/a><\/li>\n<\/ol>\n
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                                                                                              1. Pogrebnyak A.D., Shpak A.P., Beresnev V.M., Kirik G.V., Kolesnikov D.A., Komarov F.F., Konarski P., Makhmudov N.A., Kaverin M.V., Grudnitskii V.V. Stoichiometry, phase composition, and properties of superhard nanostructured Ti\u2013Hf\u2013Si\u2013N coatings obtained by deposition from high\u2011frequency vacuum-arc discharge. Technical Physics Letters. 2011. Vol. 37, No. 7. P. 636\u2014640. https:\/\/doi.org\/10.1134\/S1063785011070145<\/a><\/li>\n<\/ol>\n
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                                                                                                1. Matsue T., Hanabusa T., Miki Y., Kusaka K., Maitani E. Residual stress in TiN film deposited by ion plating. Thin Solid Films. 1999. Vol. 343\u2014344. P. 257\u2014260. https:\/\/doi.org\/10.1016\/S0040-6090(98)01641-1<\/a><\/li>\n<\/ol>\n
                                                                                                    \n
                                                                                                  1. \u0411\u0435\u0440\u0435\u0441\u043de\u0432 \u0412.\u041c., \u041f\u043e\u0433\u0440\u0435\u0431\u043d\u044f\u043a \u0410.\u0414., \u0421\u043e\u0431\u043e\u043b\u044c \u041e.\u0412., \u0413\u0440\u0443\u0434\u043d\u0438\u0446\u043a\u0438\u0439 \u0412.\u0412., \u0422\u0443\u0440\u0431\u0438\u043d \u041f.\u0412., \u041a\u043e\u043b\u0435\u0441\u043d\u0438\u043a\u043e\u0432 \u0414.\u0410., \u0422\u043e\u043b\u043c\u0430\u0447\u0435\u0432\u0430 \u0413.\u041d. \u0421\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u0430 \u0438 \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430 \u0442\u0432\u0435\u0440\u0434\u044b\u0445 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439 (Ti-Zr-Si)N \u0438 (Ti-Hf-Si)N, \u043f\u043e\u043b\u0443\u0447\u0435\u043d\u043d\u044b\u0445 \u0438\u0437 \u043f\u043e\u0442\u043e\u043a\u043e\u0432 \u043c\u0435\u0442\u0430\u043b\u043b\u0438\u0447\u0435\u0441\u043a\u043e\u0439 \u043f\u043b\u0430\u0437\u043c\u044b. \u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0430\u044f \u0438\u043d\u0436\u0435\u043d\u0435\u0440\u0438\u044f \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u0438. 2010. \u0422. 8, \u2116 2. \u0421. 124\u2014129<\/li>\n<\/ol>\n
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                                                                                                    1. Grudnitskiy V.V., Beresnev V.M., Drobyshevskaya \u0410.\u0410., Turbin P.V., Toryanik I.N., Grankin S.S., Kolesnikov D.\u0410., Nemchenko U.S. Elemental and phase analysis of nanocomposite coatings on basis Ti-Hf-Si-N system received by the vacuum-arc deposition method. \u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0430\u044f \u0438\u043d\u0436\u0435\u043d\u0435\u0440\u0438\u044f \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u0438. 2012. T. 10, \u2116 3. C. 286\u2014294.<\/li>\n<\/ol>\n
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                                                                                                      1. Zel\u2019tser I.A., Karabanov A.S., Moos E.N. Formation of dissipative structures in crystals during heat and electron transport. Physics of the Solid State. 2005. Vol. 47, No. 1\u20144. P. 1999\u20142004. https:\/\/doi.org\/10.1134\/1.2131135<\/a><\/li>\n
                                                                                                      2. E\u043c\u0435\u043b\u044c\u044f\u043d\u043e\u0432 \u0412.\u0418., \u0420\u0443\u0445\u043b\u044f\u0434\u0430 \u041d.\u042f. \u0414\u0435\u0444\u0435\u043a\u0442\u043d\u043e-\u0438\u043d\u0434\u0443\u0446\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u0430\u044f \u043d\u0435\u0443\u0441\u0442\u043e\u0439\u0447\u0438\u0432\u043e\u0441\u0442\u044c \u0438 \u043e\u0431\u0440\u0430\u0437\u043e\u0432\u0430\u043d\u0438\u0435 \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u043d\u044b\u0445 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440 \u0441 \u0434\u0432\u0443\u043c\u044f \u043c\u0430\u0441\u0448\u0442\u0430\u0431\u0430\u043c\u0438 \u043f\u0440\u0438 \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0435 \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u0438 \u043f\u043b\u0430\u0437\u043c\u043e\u0439. \u041d\u0430\u0443\u043a\u043e\u0435\u043c\u043a\u0438\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438. 2009. \u0422. 10, \u2116 6. \u0421. 3\u201413.<\/li>\n<\/ol>\n
                                                                                                          \n
                                                                                                        1. \u0413\u0440\u0443\u0434\u043d\u0438\u0446\u044c\u043a\u0438\u0439 \u0412.\u0412. \u0421\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u0430 \u0442\u0430 \u0444\u0456\u0437\u0438\u043a\u043e-\u043c\u0435\u0445\u0430\u043d\u0456\u0447\u043d\u0456 \u0432\u043b\u0430\u0441\u0442\u0438\u0432\u043e\u0441\u0442\u0456 \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u0438\u0445 \u043d\u0430\u043d\u043e\u043a\u043e\u043c\u043f\u043e\u0437\u0438\u0442\u043d\u0438\u0445 \u043f\u043e\u043a\u0440\u0438\u0442\u0442\u0456\u0432 \u0441\u0438\u0441\u0442\u0435\u043c\u0438 Ti-Hf-N \u0456 Ti-Hf-Si-N: \u0430\u0432\u0442\u043e\u0440\u0435\u0444. \u0434\u0438\u0441. … \u043a\u0430\u043d\u0434. \u0442\u0435\u0445\u043d. \u043d\u0430\u0443\u043a: 01.04.07. \u0425\u0430\u0440\u043a\u0456\u0432, 2012. 20 \u0441.<\/li>\n
                                                                                                        2. Major L., Morgiel J., Major B., Lackner J.M., Waldhauser W., Ebner R., Nistor L., Van Tendeloo G. Crystallographic aspects related to advanced tribological multilayers of Cr\/CrN and Ti\/TiN types produced by pulsed laser deposition (PLD). Surface and Coatings Technology. 2006. Vol. 200, No. 22\u201423. P. 6190\u20146195. https:\/\/doi.org\/10.1016\/j.surfcoat.2005.11.021<\/a><\/li>\n<\/ol>\n
                                                                                                            \n
                                                                                                          1. \u0413\u0440\u0443\u0434\u043d\u0438\u0446\u043a\u0438\u0439 \u0412.\u0412., \u0421\u043c\u043e\u043b\u044f\u043a\u043e\u0432\u0430 \u041c.\u042e., \u041d\u0435\u043c\u0447\u0435\u043d\u043a\u043e \u0423.\u0421., \u0411\u0435\u0440\u0435\u0441\u043d\u0435\u0432 \u0412.\u041c., \u041f\u043e\u0433\u0440\u0435\u0431\u043d\u044f\u043a \u0410.\u0414., \u0421\u043e\u0431\u043e\u043b\u044c \u041e.\u0412., \u041a\u043e\u043b\u0435\u0441\u043d\u0438\u043a\u043e\u0432 \u0414.\u0410., \u0422\u0443\u0440\u0431\u0438\u043d \u041f.\u0412., \u041a\u0430\u0432\u0435\u0440\u0438\u043d M.\u0412. \u0424\u0438\u0437\u0438\u043a\u043e-\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0438 \u0442\u0440\u0438\u0431\u043e\u0442\u0435\u0445\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430 \u043d\u0430\u043d\u043e\u043a\u043e\u043c\u043f\u043e\u0437\u0438\u0442\u043d\u044b\u0445 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439 Zr-Ti-Si-N, Ti-Hf-Si-N. \u0412\u043e\u043f\u0440\u043e\u0441\u044b \u0430\u0442\u043e\u043c\u043d\u043e\u0439 \u043d\u0430\u0443\u043a\u0438 \u0438 \u0442\u0435\u0445\u043d\u0438\u043a\u0438. 2011. \u2116 6. \u0421. 179\u2014183.<\/li>\n
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                                                                                                                1. \u041a\u0440\u0438\u043e\u043d\u0438 \u041d.\u041a., \u041c\u0438\u0433\u0440\u0430\u043d\u043e\u0432 \u041c.\u0428., \u0428\u0443\u0441\u0442\u0435\u0440 \u041b.\u0428. \u041a\u043e\u043c\u043f\u043e\u0437\u0438\u0446\u0438\u043e\u043d\u043d\u044b\u0435 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u044b \u0441 \u043f\u0440\u043e\u0433\u043d\u043e\u0437\u0438\u0440\u0443\u0435\u043c\u043e\u0439 \u0430\u0434\u0430\u043f\u0442\u0430\u0446\u0438\u0435\u0439 \u043f\u0440\u0438 \u0442\u0440\u0435\u043d\u0438\u0438 \u0438 \u0440\u0435\u0437\u0430\u043d\u0438\u0438 \u043c\u0435\u0442\u0430\u043b\u043b\u043e\u0432. \u0412\u0435\u0441\u0442\u043d\u0438\u043a \u0423\u0413\u0410\u0422\u0423. 2009. \u0422. 12, \u2116 2. \u0421. 88\u201492.<\/li>\n<\/ol>\n
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                                                                                                                  2. \u041c\u0430\u0446\u0435\u0432\u0438\u0442\u044b\u0439 \u0412.\u041c., \u041a\u0430\u0437\u0430\u043a \u0418.\u0411., \u0412\u0430\u043a\u0443\u043b\u0435\u043d\u043a\u043e \u041a.\u0412. \u0424\u0438\u0437\u0438\u043a\u043e-\u0442\u0435\u0445\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0430\u0441\u043f\u0435\u043a\u0442\u044b \u0430\u0434\u0433\u0435\u0437\u0438\u0438 \u0442\u0432\u0435\u0440\u0434\u044b\u0445 \u0442\u0435\u043b. \u041a\u0438\u0435\u0432: \u041d\u0430\u0443\u043a\u043e\u0432\u0430 \u0434\u0443\u043c\u043a\u0430, 2010. 256 \u0441.<\/li>\n
                                                                                                                  3. Barshilia H.C., Rajam K.S. Deposition of TiN\/CrN hard superlattices by reactive D.C. magne tron sputtering. Bulletin of Materials Science. 2003. Vol. 26. \u0420. 233\u2014237. https:\/\/doi.org\/10.1007\/BF02707797<\/a><\/li>\n<\/ol>\n
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                                                                                                                    3. Lee J.H., Kim W.M., Lee T.S., Chung M.K., Cheong B., Kim S.G. Mechanical and adhesion properties of Al\/AlN multilayered thin films. Surface and Coatings Technology.\u00a0Vol. 133\u2014134. P. 220\u2014226. https:\/\/doi.org\/10.1016\/S0257-8972(00)00937-3<\/a><\/li>\n
                                                                                                                    4. Shih K K., Dove D.V. Ti\/Ti-N, Hf\/Hf-N and W\/W-N multilayer films with high mechanical hardness. Applied Physics Letters. 1992. Vol. 61. P. 654\u2014656. https:\/\/doi.org\/10.1063\/1.107812<\/a><\/li>\n<\/ol>\n
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                                                                                                                          1. Panjan M., \u015cturn S., \u0108ekada M. The influence of rotation during sputtering on the stoichiometry of TiAlN\/CrNx multilayer coating. Surface and Coatings Technology. 2008. Vol. 203. P. 554\u2014557. https:\/\/doi.org\/10.1016\/j.surfcoat.2008.04.082<\/a><\/li>\n<\/ol>\n
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                                                                                                                            1. Savisalo T., Lewis D.B., Luo Q., Bolton M., Hovsepian P. Structure of duplex CrN\/NbN coatings and their performance against corrosion and wear. Surface and Coatings Technology. 2008. Vol. 203. P. 1661\u20141667. https:\/\/doi.org\/10.1016\/j.surfcoat.2007.07.024<\/a><\/li>\n
                                                                                                                            2. Barshilia H.C., Deepthi B., Rajam K.S. Growth and characterization of TiAlN\/CrAlN superlattices prepared by reactive direct current magnetron sputtering. Journal of Vacuum Science and Technology A. 2009. Vol. 27, No. 1. P. 29\u201436. https:\/\/doi.org\/10.1116\/1.3013858<\/a><\/li>\n<\/ol>\n
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                                                                                                                              1. Panjan M., \u010cekada M., Panjan P., Zalar A., Peterman T. Sputtering simulation of multilayer coatings in industrial PVD system with three-fold rotation. Vacuum. 2008. Vol. 82. P 158\u2014161. https:\/\/doi.org\/10.1016\/j.vacuum.2007.07.053<\/a><\/li>\n
                                                                                                                              2. Munz W.D. Large-scale manufacturing of nanoscale multilayered hard coatings deposited by cat hodic arc\/unbalanced magnetron sputtering. MRS Bulletin. 2003. Vol. 28. P. 173\u2014179. https:\/\/doi.org\/10.1557\/mrs2003.58<\/a><\/li>\n
                                                                                                                              3. Helmersson U., Todorova S., Barnett S.A., Sundgren J.\u2010E., Markert L.C., Greene J.E. Growth of single\u2010crystal TiN\/VN strained\u2010layer superlattices with extremely high mechanical hardness. Journal of Applied Physics. 1987. Vol. 62. P. 481\u2014484. https:\/\/doi.org\/10.1063\/1.339770<\/a><\/li>\n<\/ol>\n
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                                                                                                                                1. Yue J.L., Yin Y.S., Li G.Y. Microstructure, mechanical properties and thermal stability of TiAlN\/Si3N4 nano-multilayer films deposited by reactive magnetron sputtering. Advanced Materials Research. 2009. Vol. 79\u201482. P. 489\u2014492. https:\/\/doi.org\/10.4028\/www.scientific.net\/AMR.79-82.489<\/a><\/li>\n<\/ol>\n
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                                                                                                                                  1. Stueber M., Holleck H., Leiste H., Seemann K., Ulrich S., Ziebert C. Concepts for the design of advanced nanoscale PVD multilayer protective thin films. Journal of Alloys and Compounds. 2009. Vol. 483. P. 321\u2014333. https:\/\/doi.org\/10.1016\/j.jallcom.2008.08.133<\/a><\/li>\n
                                                                                                                                  2. Raab R., Koller C.M., Kolozsvari S., Ramm J., Mayrhofer P.H. Thermal stability of arc evaporated Al-Cr-O and Al-Cr-O\/Al-Cr-N multilayer coatings. Surface and Coatings Technology. 2018. Vol. 352. P. 213\u2014221. https:\/\/doi.org\/10.1016\/j.surfcoat. 2018.08.002<\/a><\/li>\n<\/ol>\n
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                                                                                                                                    1. Yashar P.C., Sproul W.D. Nanometer scale multilayered hard coatings. Vacuum. 1999. Vol. 55, No. 3\u20144. P. 179\u2014190. https:\/\/doi.org\/10.1016\/S0042-207X(99)00148-7<\/a><\/li>\n
                                                                                                                                    2. Abadias G., Michel A., Tromas C., Jaouen C., Dub S.N. Stress, interfacial effects and mechanical properties of nanoscale multilayered coatings. Surface and Coatings Technology. 2007. Vol. 202. P. 844\u2014853. https:\/\/doi.org\/10.1016\/j.surfcoat.2007.05.068<\/a><\/li>\n
                                                                                                                                    3. Stueber M., Holleck H., Leiste H., Seemann K., Ulrich S., Ziebert C. Concept for the design of advanced nanoscale PVD multilayer protective thin films. Journal of Alloys and Compounds. 2009. Vol. 483. P. 321\u2014354. https:\/\/doi.org\/10.1016\/j.jallcom. 2008.08.133<\/a><\/li>\n
                                                                                                                                    4. Bondar O.V. et al. Structure and mechanical properties of multilayered nanostructured TiN\/ZrN ion-plasma coatings. In: Nanomaterials: Application and Properties: \u0420roc. Int. Conf. 2015. Vol. 4, No. 1. 01NTF12.<\/li>\n<\/ol>\n
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                                                                                                                                      1. Bondar O.V., Beresnev V.M., Kravchenko Ya.O., Koltunowicz T.N. Nanoscale TiN\/ZrN Multilayered Coatings, Their Structure and Properties. In: Nanomaterials: Application and Properties: \u0420roc. Int. Conf. 2016. Vol. 5. No. 1. 01NTF07.<\/li>\n
                                                                                                                                      2. Pogrebnjak A., Ivashchenko V., Bondar O., Beresnev V., Sobol O., Za\u0142\u0119ski K., Jurga S., Coy E., Konarski P., Postolnyi B. Multilayered vacuum-arc nanocomposite TiN\/ZrN coatings before and after annealing: Structure, properties, firstprinciples calculations. Materials Characterization. 2017. Vol. 134. P. 55\u201463. https:\/\/doi.org\/ 10.1016\/j.matchar.2017.10.016<\/li>\n
                                                                                                                                      3. \u041a\u0443\u043f\u0440\u0438\u043d A.\u0421., \u0411\u0435\u043b\u043e\u0443\u0441 \u0412.\u0410., \u0412\u043e\u0435\u0432\u043e\u0434\u0438\u043d \u0412.\u041d., \u0411\u0440\u044b\u043a \u0412.\u0412., \u0412\u0430\u0441\u0438\u043b\u0435\u043d\u043a\u043e \u0420.\u041b., \u041e\u0432\u0447\u0430\u0440\u0435\u043d\u043a\u043e \u0412.\u0414., \u0422\u043e\u043b\u043c\u0430\u0447\u0451\u0432\u0430 \u0413.\u041d., \u0412\u044c\u044e\u0433\u043e\u0432 \u041f.\u041d. \u0412\u044b\u0441\u043e\u043a\u043e\u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u043d\u043e\u0435 \u043e\u043a\u0438\u0441\u043b\u0435\u043d\u0438\u0435 \u043d\u0430 \u0432\u043e\u0437\u0434\u0443\u0445\u0435 \u043e\u0431\u043e\u043b\u043e\u0447\u0435\u043a \u0438\u0437 \u0446\u0438\u0440\u043a\u043e\u043d\u0438\u0435\u0432\u044b\u0445 \u0441\u043f\u043b\u0430\u0432\u043e\u0432 110 \u0438 Zr-1Nb \u0441 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f\u043c\u0438. B\u043e\u043f\u0440\u043e\u0441\u044b \u0430\u0442\u043e\u043c\u043d\u043e\u0439 \u043d\u0430\u0443\u043a\u0438 \u0438 \u0442\u0435\u0445\u043d\u0438\u043a\u0438. 2014. \u2116 1. \u0421. 126\u2014131.<\/li>\n
                                                                                                                                      4. \u0421\u0442\u043e\u0435\u0432 \u041f.\u0418., \u0411\u0435\u043b\u043e\u0443\u0441 \u0412.\u0410., \u0412\u043e\u0435\u0432\u043e\u0434\u0438\u043d \u0412.\u041d., \u041a\u0443\u043f\u0440\u0438\u043d \u0410.\u0421., \u041b\u0435\u043e\u043d\u043e\u0432 \u0421.\u0410., \u041e\u0432\u0447\u0430\u0440\u0435\u043d\u043a\u043e \u0412.\u0414., \u0422\u0438\u0445\u043e\u043d\u043e\u0432\u0441\u043a\u0438\u0439 \u041c.\u0410., \u0425\u043e\u0440\u043e\u0448\u0438\u0445 \u0412.\u041c. \u041c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430 \u0438 \u0430\u043a\u0443\u0441\u0442\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u043f\u0430\u0440\u0430\u043c\u0435\u0442\u0440\u044b \u0442\u0432\u044d\u043b\u044c\u043d\u044b\u0445 \u0442\u0440\u0443\u0431 \u0438\u0437 \u0441\u043f\u043b\u0430\u0432\u0430 \u0446\u0438\u0440\u043a\u043e\u043d\u0438\u044f Zr1%Nb \u0441 \u0437\u0430\u0449\u0438\u0442\u043d\u044b\u043c\u0438 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f\u043c\u0438. \u0412\u043e\u043f\u0440\u043e\u0441\u044b \u0430\u0442\u043e\u043c\u043d\u043e\u0439 \u043d\u0430\u0443\u043a\u0438 \u0438 \u0442\u0435\u0445\u043d\u0438\u043a\u0438. 2015. \u2116 5. C. 87\u201497.<\/li>\n
                                                                                                                                      5. \u0421\u043e\u0431\u043e\u043b\u044c O.\u0412., \u0410\u043d\u0434\u0440\u0435\u0435\u0432 \u0410.\u041e., \u0413\u043e\u0440\u0431\u0430\u043d\u044c \u0412.\u0424., \u0421\u0442\u043e\u043b\u0431\u043e\u0432\u043e\u0439 \u0412.\u041e., \u041f\u0438\u043d\u0447\u0443\u043a \u041d.\u0412., \u041c\u0435\u0439\u043b\u0435\u0445\u043e\u0432 \u0410.\u041e. \u0412\u043b\u0438\u044f\u043d\u0438\u0435 \u0442\u043e\u043b\u0449\u0438\u043d\u044b \u0431\u0438\u0441\u043b\u043e\u0435\u0432 TiN\/ZrN \u043d\u0430 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u0443 \u0438 \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430 \u043c\u043d\u043e\u0433\u043e\u0441\u043b\u043e\u0439\u043d\u044b\u0445 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439, \u043f\u043e\u043b\u0443\u0447\u0435\u043d\u043d\u044b\u0445 \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u044b\u043c \u0438\u0441\u043f\u0430\u0440\u0435\u043d\u0438\u0435\u043c. \u0412\u043e\u043f\u0440\u043e\u0441\u044b \u0430\u0442\u043e\u043c\u043d\u043e\u0439 \u043d\u0430\u0443\u043a\u0438 \u0438 \u0442\u0435\u0445\u043d\u0438\u043a\u0438. 2015. \u2116 2. \u0421. 124\u2014128.<\/li>\n
                                                                                                                                      6. Cenzel C., Reinmers W. A study of X-ray residual stress gradient analysis in thin layers with strong fibre texture. Physica Status Solidi A. 1998. Vol. 166, No. 2. P. 751\u2014762 https:\/\/doi.org\/10.1002\/(SICI)1521-396X(199802)165:2<347::AID-PSSA347>3.0.CO;2-K<\/a><\/li>\n
                                                                                                                                      7. \u0413\u0440\u0430\u043d\u043a\u0438\u043d \u0421.\u0421., \u0421\u0442\u043e\u043b\u0431\u043e\u0432\u043e\u0439 \u0412.\u0410., \u041d\u0435\u043c\u0447\u0435\u043d\u043a\u043e \u0423.\u0421., \u0411\u0435\u0440\u0435\u0441\u043d\u0435\u0432 \u0412.\u041c., \u0421\u043e\u0431\u043e\u043b\u044c \u041e.\u0412., \u041b\u0438\u0442\u043e\u0432\u0447\u0435\u043d\u043a\u043e \u0421.\u0412., \u0422\u0443\u0440\u0431\u0438\u043d \u041f.\u0412., \u041d\u043e\u0432\u0438\u043a\u043e\u0432 \u0412.\u042e., \u041f\u0440\u043e\u0446\u0435\u043d\u043a\u043e \u0417.\u041d. \u0422\u0440\u0438\u0431\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0445\u0430\u0440\u0430\u043a\u0442\u0435\u0440\u0438\u0441\u0442\u0438\u043a\u0438 \u0438 \u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430 \u043c\u043d\u043e\u0433\u043e\u0441\u043b\u043e\u0439\u043d\u044b\u0445 \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u044b\u0445 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439 TiN\/ZrN. \u0412\u043e\u043f\u0440\u043e\u0441\u044b \u0430\u0442\u043e\u043c\u043d\u043e\u0439 \u043d\u0430\u0443\u043a\u0438 \u0438 \u0442\u0435\u0445\u043d\u0438\u043a\u0438. 2015. \u2116 5. \u0421. 70\u201476.<\/li>\n
                                                                                                                                      8. \u0421\u043e\u0431\u043e\u043b\u044c \u041e.\u0412., \u0410\u043d\u0434\u0440\u0435\u0435\u0432 \u0410.\u041e., \u0421\u0442\u043e\u043b\u0431\u043e\u0432\u0438\u0439 \u0412.\u0410., \u0413\u043e\u0440\u0431\u0430\u043d\u044c \u0412.\u0424., \u041f\u0456\u043d\u0447\u0443\u043a \u041d.\u0412., \u041c\u0435\u0439\u043b\u0435\u0445\u043e\u0432 \u0410.\u041e. \u0421\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u043d\u0430\u044f \u0438\u043d\u0436\u0435\u043d\u0435\u0440\u0438\u044f \u043c\u043d\u043e\u0433\u043e\u0441\u043b\u043e\u0439\u043d\u043e\u0439 \u0441\u0438\u0441\u0442\u0435\u043c\u044b TiN\/CrN, \u043f\u043e\u043b\u0443\u0447\u0435\u043d\u043d\u043e\u0439 \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u044b\u043c \u0438\u0441\u043f\u0430\u0440\u0435\u043d\u0438\u0435\u043c. \u0416\u0443\u0440\u043d\u0430\u043b \u043d\u0430\u043d\u043e- \u0442\u0430 \u0435\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u043e\u0457 \u0444\u0456\u0437\u0438\u043a\u0438. 2015. T. 7, \u2116 1. C. 01034.<\/li>\n
                                                                                                                                      9. Sobol O.V., Andreev A.A., Gorban V.F., Stolbovoy V.A., Meylekhov A.A., Postelnyk A.A., Dolomanov A.V. Influence of pressure of working atmosphere on the formation of phase-structural state and physical and mechanical properties of vacuum-arc-multilayer coating ZrN\/CrN. \u0412\u043e\u043f\u0440\u043e\u0441\u044b \u0430\u0442\u043e\u043c\u043d\u043e\u0439 \u043d\u0430\u0443\u043a\u0438 \u0438 \u0442\u0435\u0445\u043d\u0438\u043a\u0438. 2016. \u2116 1. \u0421. 134\u2014139.<\/li>\n<\/ol>\n
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                                                                                                                                        1. Sobol O.V., Andreev A.A., Gorban V.F., Stolbovoy V.A., Melekhov A.A., Postelnyk A.A. Possibilities of structural engineering in multilayer vacuum-arc ZrN\/CrN coatings by varying the nanolayer thickness and application of a bias potential. Technical Physics. 2016. Vol. 61, No. 7. P. 1060\u20141063. https:\/\/doi.org\/10.1134\/S1063784216070252<\/a><\/li>\n<\/ol>\n
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                                                                                                                                                    3. \u0413\u0440\u0430\u043d\u043a\u0438\u043d \u0421.\u0421., \u0411\u0435\u0440\u0435\u0441\u043d\u0435\u0432 \u0412.\u041c., \u0421\u043e\u0431\u043e\u043b\u044c \u041e.\u0412., \u041b\u0438\u0442\u043e\u0432\u0447\u0435\u043d\u043a\u043e \u0421.\u0412., \u0421\u0442\u043e\u043b\u0431\u043e\u0432\u043e\u0439 \u0412.\u0410., \u041a\u043e\u043b\u0435\u0441\u043d\u0438\u043a\u043e\u0432 \u0414.\u0410., \u041c\u0435\u0439\u043b\u0435\u0445\u043e\u0432 \u0410.\u0410., \u041f\u043e\u0441\u0442\u0435\u043b\u044c\u043d\u0438\u043a \u0410.\u0410., \u0422\u043e\u0440\u044f\u043d\u0438\u043a \u0418.\u041d. \u0412\u043b\u0438\u044f\u043d\u0438\u0435 \u0432\u044b\u0441\u043e\u043a\u043e\u0432\u043e\u043b\u044c\u0442\u043d\u043e\u0433\u043e \u043f\u043e\u0441\u0442\u043e\u044f\u043d\u043d\u043e\u0433\u043e \u043f\u043e\u0442\u0435\u043d\u0446\u0438\u0430\u043b\u0430 \u0441\u043c\u0435\u0449\u0435\u043d\u0438\u044f \u043d\u0430 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u0443 \u0438 \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430 \u043c\u043d\u043e\u0433\u043e\u0441\u043b\u043e\u0439\u043d\u043e\u0433\u043e \u043a\u043e\u043c\u043f\u043e\u0437\u0438\u0446\u0438\u043e\u043d\u043d\u043e\u0433\u043e \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u0430 MoN\/CrN \u0441 \u0440\u0430\u0437\u043d\u043e\u0439 \u0442\u043e\u043b\u0449\u0438\u043d\u043e\u0439 \u0441\u043b\u043e\u0435\u0432. \u0412\u043e\u043f\u0440\u043e\u0441\u044b \u0430\u0442\u043e\u043c\u043d\u043e\u0439 \u043d\u0430\u0443\u043a\u0438 \u0438 \u0442\u0435\u0445\u043d\u0438\u043a\u0438. 2016. \u2116 1. \u0421. 154\u2014159.<\/li>\n<\/ol>\n
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                                                                                                                                                      1. \u0421\u0442\u043e\u043b\u0431\u043e\u0432\u043e\u0439 \u0412.\u0410. \u0412\u043b\u0438\u044f\u043d\u0438\u0435 \u0442\u043e\u043b\u0449\u0438\u043d\u044b \u043f\u0435\u0440\u0438\u043e\u0434\u0430 \u043c\u043d\u043e\u0433\u043e\u0441\u043b\u043e\u0439\u043d\u043e\u0433\u043e \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f MoN\/CrN \u043d\u0430 \u0444\u0438\u0437\u0438\u043a\u043e-\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0445\u0430\u0440\u0430\u043a\u0442\u0435\u0440\u0438\u0441\u0442\u0438\u043a\u0438. \u0416\u0443\u0440\u043d\u0430\u043b \u0444\u0456\u0437\u0438\u043a\u0438 \u0442\u0430 \u0456\u043d\u0436\u0435\u043d\u0435\u0440\u0456\u0457 \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u0456. 2016. \u0422. 1, \u2116 3. \u0421. 320\u2014328.<\/li>\n
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                                                                                                                                                                      1. \u0421\u043e\u0431\u043e\u043b\u044c \u041e.\u0412. \u0438 \u0434\u0440. \u0421\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u043d\u0430\u044f \u0438\u043d\u0436\u0435\u043d\u0435\u0440\u0438\u044f \u043c\u043d\u043e\u0433\u043e\u043f\u0435\u0440\u0438\u043e\u0434\u043d\u044b\u0445 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439 \u043d\u0438\u0442\u0440\u0438\u0434\u043e\u0432 \u043f\u0435\u0440\u0435\u0445\u043e\u0434\u043d\u044b\u0445 \u043c\u0435\u0442\u0430\u043b\u043b\u043e\u0432. \u0412 \u043a\u043d.: \u0412\u044b\u0441\u043e\u043a\u043e\u0447\u0438\u0441\u0442\u044b\u0435 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u044b: \u043f\u043e\u043b\u0443\u0447\u0435\u043d\u0438\u0435, \u043f\u0440\u0438\u043c\u0435\u043d\u0435\u043d\u0438\u044f, \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430: \u043c\u0430\u0442\u0435\u0440. \u0434\u043e\u043a\u043b. 3-\u0439 \u041c\u0435\u0436\u0434. \u043a\u043e\u043d\u0444. \u0425\u0430\u0440\u044c\u043a\u043e\u0432: \u041d\u041d\u0426 \u0425\u0424\u0422\u0418, 2015. \u0421. 47.<\/li>\n<\/ol>\n
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                                                                                                                                                                                                                                                                4. \u0410\u0437\u0430\u0440\u0435\u043d\u043a\u043e\u0432 \u041d.\u0410., \u0411\u0435\u0440\u0435\u0441\u043d\u0435\u0432 \u0412.\u041c., \u0422\u043e\u0440\u044f\u043d\u0438\u043a \u0418.\u041d. \u0418\u043e\u043d\u043d\u043e-\u043f\u043b\u0430\u0437\u043c\u0435\u043d\u043d\u043e\u0435 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0435 \u0441\u0438\u0441\u0442\u0435\u043c\u044b AlN-TiB2-TiSi2, \u043f\u043e\u043b\u0443\u0447\u0435\u043d\u0438\u0435 \u0438 \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430. \u0412\u043e\u043f\u0440\u043e\u0441\u044b \u0430\u0442\u043e\u043c\u043d\u043e\u0439 \u043d\u0430\u0443\u043a\u0438 \u0438 \u0442\u0435\u0445\u043d\u0438\u043a\u0438. 2013. \u2116 2. \u0421. 144\u2014147.<\/li>\n
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                                                                                                                                                                                                                                                                6. \u0421\u0430\u043c\u0441\u043e\u043d\u043e\u0432 \u0413.\u0412., \u0412\u0438\u043d\u043d\u0438\u0446\u043a\u0438\u0439 \u0418.\u041c. \u0422\u0443\u0433\u043e\u043f\u043b\u0430\u0432\u043a\u0438\u0435 \u0441\u043e\u0435\u0434\u0438\u043d\u0435\u043d\u0438\u044f: \u0441\u043f\u0440\u0430\u0432\u043e\u0447\u043d\u0438\u043a. \u041c\u043e\u0441\u043a\u0432\u0430: \u041c\u0435\u0442\u0430\u043b\u043b\u0443\u0440\u0433\u0438\u044f, 1976. 560 \u0441.<\/li>\n<\/ol>\n
                                                                                                                                                                                                                                                                    \n
                                                                                                                                                                                                                                                                  1. \u0421\u0430\u043c\u0441\u043e\u043d\u043e\u0432 \u0413.\u0412., \u0414\u0432\u043e\u0440\u0438\u043d\u0430 \u041b.\u0410., \u0420\u0443\u0434\u044c \u041f.\u0412. \u0421\u0438\u043b\u0438\u0446\u0438\u0434\u044b. \u041c\u043e\u0441\u043a\u0432\u0430: \u041c\u0435\u0442\u0430\u043b\u043b\u0443\u0440\u0433\u0438\u044f, 1979. 272 \u0441.<\/li>\n<\/ol>\n
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                                                                                                                                                                                                                                                                          \n
                                                                                                                                                                                                                                                                        1. \u0413\u043e\u0440\u0431\u0430\u043d\u044c \u0412.\u0424., \u041c\u0430\u043c\u0435\u043a\u0430 \u041d.\u0410., \u041f\u0435\u0447\u043a\u043e\u0432\u0441\u043a\u0438\u0439 \u042d.\u041f., \u0424\u0438\u0440\u0441\u0442\u043e\u0432 \u0421.\u0410. \u0418\u0434\u0435\u043d\u0442\u0438\u0444\u0438\u043a\u0430\u0446\u0438\u044f \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u043d\u043e\u0433\u043e \u0441\u043e\u0441\u0442\u043e\u044f\u043d\u0438\u044f \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u043e\u0432 \u043c\u0435\u0442\u043e\u0434\u043e\u043c \u0430\u0432\u0442\u043e\u043c\u0430\u0442\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e \u0438\u043d\u0434\u0435\u043d\u0442\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u044f. \u0425\u0430\u0440\u044c\u043a\u043e\u0432\u0441\u043a\u0430\u044f \u043d\u0430\u043d\u043e\u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u0430\u044f \u0430\u0441\u0441\u0430\u043c\u0431\u043b\u0435\u044f: \u0441\u0431. \u0434\u043e\u043a\u043b. \u0425\u0430\u0440\u044c\u043a\u043e\u0432: \u041d\u041d\u0426 \u0425\u0424\u0422\u0418, \u0418\u041f\u041f \u041a\u043e\u043d\u0442\u0440\u0430\u0441\u0442, 2007. \u0421. 52\u201455.<\/li>\n<\/ol>\n
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                                                                                                                                                                                                                                                                              2. \u0411\u043e\u043b\u0433\u0430\u0440 \u0410.\u0421., \u041b\u0438\u0442\u0432\u0438\u043d\u0435\u043d\u043a\u043e \u0412.\u0424. \u0422\u0435\u0440\u043c\u043e\u0434\u0438\u043d\u0430\u043c\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430 \u043d\u0438\u0442\u0440\u0438\u0434\u043e\u0432. \u041a\u0438\u0435\u0432: \u041d\u0430\u0443\u043a\u043e\u0432\u0430 \u0434\u0443\u043c\u043a\u0430, 1980. 284 \u0441.<\/li>\n
                                                                                                                                                                                                                                                                              3. \u041d\u0435\u043c\u0447\u0435\u043d\u043a\u043e \u0423.\u0421. \u0417\u0430\u043a\u043e\u043d\u043e\u043c\u0456\u0440\u043d\u043e\u0441\u0442\u0456 \u0444\u043e\u0440\u043c\u0443\u0432\u0430\u043d\u043d\u044f \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u0438\u0445 \u043d\u0456\u0442\u0440\u0438\u0434\u043d\u0438\u0445 \u043f\u043e\u043a\u0440\u0438\u0442\u0442\u0456\u0432 \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0456 \u0432\u0438\u0441\u043e\u043a\u043e\u0435\u043d\u0442\u0440\u043e\u043f\u0456\u0439\u043d\u0438\u0445 \u0441\u043f\u043b\u0430\u0432\u0456\u0432: \u0430\u0432\u0442\u043e\u0440\u0435\u0444. \u0434\u0438\u0441. … \u043a\u0430\u043d\u0434. \u0444\u0456\u0437.-\u043c\u0430\u0442.\u043d\u0430\u0443\u043a: 01.04.07. \u0425\u0430\u0440\u043a\u0456\u0432, 2016. 20 \u0441.<\/li>\n
                                                                                                                                                                                                                                                                              4. \u0411\u0430\u0433\u0434\u0430\u0441\u0430\u0440\u044f\u043d \u0410.\u0410. \u0421\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u043d\u043e-\u0444\u0430\u0437\u043e\u0432\u043e\u0435 \u0441\u043e\u0441\u0442\u043e\u044f\u043d\u0438\u0435 \u0438 \u0444\u0438\u0437\u0438\u043a\u043e-\u043c\u0435\u0445\u0430\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0441\u0432\u043e\u0439\u0441\u0442\u0432\u0430 \u043d\u0438\u0442\u0440\u0438\u0434\u043d\u044b\u0445 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439 \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 Ti, Hf, Zr, V \u0438 Nb: \u0434\u0438\u0441. … \u043a\u0430\u043d\u0434. \u0444\u0456\u0437.-\u043c\u0430\u0442.\u043d\u0430\u0443\u043a: 01.04.07. \u0421\u0443\u043c\u0438, 2015. 140 \u0441.<\/li>\n<\/ol>\n
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                                                                                                                                                                                                                                                                                    1. \u0410\u0437\u0430\u0440\u0435\u043d\u043a\u043e\u0432 \u041d.\u0410., \u0421\u043e\u0431\u043e\u043b\u044c \u041e.\u0412., \u041f\u043e\u0433\u0440\u0435\u0431\u043d\u044f\u043a \u0410.\u0414., \u0411\u0435\u0440\u0435\u0441\u043d\u0435\u0432 \u0412.\u041c. \u0418\u043d\u0436\u0435\u043d\u0435\u0440\u0438\u044f \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u043f\u043b\u0430\u0437\u043c\u0435\u043d\u043d\u044b\u0445 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439. \u0425\u0430\u0440\u044c\u043a\u043e\u0432: \u0425\u041d\u0423 \u0438\u043c\u0435\u043d\u0438 \u0412.\u041d. \u041a\u0430\u0440\u0430\u0437\u0438\u043d\u0430, 2011. 344 \u0441.<\/li>\n
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                                                                                                                                                                                                                                                                                                        1. Ren B., Liu Z, Shi L., Cai B., Wang M.X. Structure and properties of (AlCrMnMoNiZrB0.1) Nx coatings prepared by reactive DC sputtering. Applied Surface Scitnce. 2011. Vol. 257. P. 7172\u20147178. https:\/\/doi.org\/10.1016\/j.apsusc.2011.03.083<\/a><\/li>\n
                                                                                                                                                                                                                                                                                                        2. Chang Z.-C., Liang S.-C., Han S. Effect of microstructure on the nanomechanical properties of TiVCrZrAl nitride films deposited by magnetron sputtering. Nuclear Instruments and Methods in Physics Research B: Beam Interactions with Materials and Atoms. 2011. Vol. 269. P. 1973\u20141976. https:\/\/doi.org\/10.1016\/j.nimb.2011.05.027<\/a><\/li>\n
                                                                                                                                                                                                                                                                                                        3. Beresnev V.M., Shabelnyk Yu.M., Shumakova N.I., Nyemchenko U.S., Klymenko S.\u0410., Manokhin \u0410.S. Regularity of formation of vacuum-arc nitride coating based on multi-component alloys. Journal of Nano- and Electronic Physics. 2017. Vol. 9, No. 4. P. 04023. https:\/\/doi.org\/10.21272\/jnep.9(4).04023<\/a><\/li>\n
                                                                                                                                                                                                                                                                                                        4. \u0412\u0435\u0440\u0435\u0449\u0430\u043a\u0430 \u0410.\u0421., \u0412\u0435\u0440\u0435\u0449\u0430\u043a\u0430 \u0410.\u0410., \u0411\u0443\u0431\u043b\u0438\u043a\u043e\u0432 \u042e.\u0418., \u041e\u0433\u0430\u043d\u044f\u043d \u041c.\u0413. \u041d\u0430\u043d\u043e\u0440\u0430\u0437\u043c\u0435\u0440\u043d\u044b\u0435 \u043c\u043d\u043e\u0433\u043e\u0441\u043b\u043e\u0439\u043d\u043e-\u043a\u043e\u043c\u043f\u043e\u0437\u0438\u0446\u0438\u043e\u043d\u043d\u044b\u0435 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f \u0434\u043b\u044f \u043f\u043e\u0432\u044b\u0448\u0435\u043d\u0438\u044f \u0438\u0437\u043d\u043e\u0441\u043e\u0441\u0442\u043e\u0439\u043a\u043e\u0441\u0442\u0438 \u0438 \u0440\u0430\u0431\u043e\u0442\u043e\u0441\u043f\u043e\u0441\u043e\u0431\u043d\u043e\u0441\u0442\u0438 \u0442\u0432\u0435\u0440\u0434\u043e\u0441\u043f\u043b\u0430\u0432\u043d\u044b\u0445 \u043a\u043e\u043d\u0446\u0435\u0432\u044b\u0445 \u0444\u0440\u0435\u0437. \u0420\u0435\u0437\u0430\u043d\u0438\u0435 \u0438 \u0438\u043d\u0441\u0442\u0440\u0443\u043c\u0435\u043d\u0442\u044b \u0432 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0441\u0438\u0441\u0442\u0435\u043c\u0430\u0445. 2014. \u0412\u044b\u043f. 84. \u0421. 26\u201442.<\/li>\n<\/ol>\n
                                                                                                                                                                                                                                                                                                            \n
                                                                                                                                                                                                                                                                                                          1. \u041f\u0430\u0442\u0435\u043d\u0442 \u0423\u043a\u0440\u0430\u0457\u043d\u0438 \u2116 96908. \u0420\u0456\u0437\u0430\u043b\u044c\u043d\u0438\u0439 \u0456\u043d\u0441\u0442\u0440\u0443\u043c\u0435\u043d\u0442 \u0437 \u0434\u0432\u043e\u0448\u0430\u0440\u043e\u0432\u0438\u043c \u043d\u0430\u043d\u043e\u043a\u0440\u0438\u0441\u0442\u0430\u043b\u0456\u0447\u043d\u0438\u043c \u043f\u043e\u043a\u0440\u0438\u0442\u0442\u044f\u043c. \u0417\u0430\u044f\u0432\u043b. 05.04.2011; \u043e\u043f\u0443\u0431\u043b. 12.12.2011, \u0431\u044e\u043b. 23.<\/li>\n
                                                                                                                                                                                                                                                                                                          2. \u0418\u043d\u0441\u0442\u0440\u0443\u043c\u0435\u043d\u0442\u044b \u0438\u0437 \u0441\u0432\u0435\u0440\u0445\u0442\u0432\u0435\u0440\u0434\u044b\u0445 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u043e\u0432. \u041f\u043e\u0434. \u0440\u0435\u0434. \u041d.\u0412. \u041d\u043e\u0432\u0438\u043a\u043e\u0432\u0430, \u0421.\u0410. \u041a\u043b\u0438\u043c\u0435\u043d\u043a\u043e. \u041c\u043e\u0441\u043a\u0432\u0430: \u041c\u0430\u0448\u0438\u043d\u043e\u0441\u0442\u0440\u043e\u0435\u043d\u0438\u0435, 2014. 608 \u0441.<\/li>\n
                                                                                                                                                                                                                                                                                                          3. \u041c\u0430\u043d\u043e\u0445\u0456\u043d \u0410.\u0421., \u041a\u043b\u0438\u043c\u0435\u043d\u043a\u043e \u0421.\u0410., \u0411\u0435\u0440\u0454\u0441\u043d\u0435\u0432 \u0412.\u041c., \u0421\u0442\u043e\u043b\u0431\u043e\u0432\u043e\u0439 \u0412.\u041e., \u041a\u043b\u0438\u043c\u0435\u043d\u043a\u043e \u0421.\u0410., \u041c\u0435\u043b\u044c\u043d\u0456\u0439\u0447\u0443\u043a \u042e.\u041e., \u041d\u0430\u0439\u0434\u0435\u043d\u043a\u043e \u0410.\u0413., \u0420\u0438\u0436\u043e\u0432 \u042e.\u0415., Depu L., Hongshun W. \u0406\u043d\u0442\u0435\u043d\u0441\u0438\u0432\u043d\u0456\u0441\u0442\u044c \u0437\u043d\u043e\u0448\u0443\u0432\u0430\u043d\u043d\u044f \u0440\u0456\u0437\u0430\u043b\u044c\u043d\u0438\u0445 \u0456\u043d\u0441\u0442\u0440\u0443\u043c\u0435\u043d\u0442\u0456\u0432, \u043e\u0441\u043d\u0430\u0449\u0435\u043d\u0438\u0445 PcBN \u0456\u0437 \u043d\u0430\u043d\u043e\u0448\u0430\u0440\u043e\u0432\u0438\u043c\u0438 \u0437\u0430\u0445\u0438\u0441\u043d\u0438\u043c\u0438 \u043f\u043e\u043a\u0440\u0438\u0442\u0442\u044f\u043c\u0438. \u041d\u0430\u0434\u0442\u0432\u0435\u0440\u0434\u0456 \u043c\u0430\u0442\u0435\u0440\u0456\u0430\u043b\u0438. 2020. \u2116 6. \u0421. 74\u201484. https:\/\/doi.org\/10.3103\/S1063457620060076<\/a><\/li>\n<\/ol>\n
                                                                                                                                                                                                                                                                                                              \n
                                                                                                                                                                                                                                                                                                            1. \u041f\u0430\u0442\u0435\u043d\u0442 \u0423\u043a\u0440\u0430\u0457\u043d\u0438 \u043d\u0430 \u043a\u043e\u0440\u0438\u0441\u043d\u0443 \u043c\u043e\u0434\u0435\u043b\u044c \u2116 86915. \u0420\u0456\u0437\u0430\u043b\u044c\u043d\u0438\u0439 \u0456\u043d\u0441\u0442\u0440\u0443\u043c\u0435\u043d\u0442 \u0437 \u043f\u043e\u043a\u0440\u0438\u0442\u0442\u044f\u043c. \u0417\u0430\u044f\u0432\u043b. 13.08.2013; \u043e\u043f\u0443\u0431\u043b. 10.01.2014, \u0431\u044e\u043b. \u2116 1.<\/li>\n
                                                                                                                                                                                                                                                                                                            2. Klimenko S.A., Podchernjaeva I.A., Beresnev V.M., Panashenko V.M., Klimenko S.An., Kopeikina M.Yu. AlN-(TiCr)B2 ion-plasma coating for cutting tools of cBN-based polycrystalline superhard material. Journal of Superhard Materials. 2014. Vol. 36, No. 3. P. 208\u2014216. https:\/\/doi.org\/10.3103\/S1063457614030095<\/a><\/li>\n
                                                                                                                                                                                                                                                                                                            3. Podchernyaeva I.A., Klimenko S.A., Beresnev V.M., Panashenko V.M., Toryanik I.N., Klimenko S.An., Kopeikina M.Yu. Formation of a Tribofilm in the Surface Layer of Al\u2013Ti\u2013Cr\u2013N\u2013B Magnetron Coating on Boron Nitride During Turning of Hardened Steel. Powder Metallurgy and Metal Ceramics. 2015. Vol. 54, No. 3\u20144. P. 140\u2014150. https:\/\/doi.org\/10.1007\/s11106-015-9691-x<\/a><\/li>\n
                                                                                                                                                                                                                                                                                                            4. \u0411\u0435\u0440\u0435\u0436\u043d\u043e\u0439 \u0410.\u0421. \u041c\u043d\u043e\u0433\u043e\u043a\u043e\u043c\u043f\u043e\u043d\u0435\u043d\u0442\u043d\u044b\u0435 \u0441\u0438\u0441\u0442\u0435\u043c\u044b \u043e\u043a\u0441\u0438\u0434\u043e\u0432. \u041a\u0438\u0435\u0432: \u041d\u0430\u0443\u043a\u043e\u0432\u0430 \u0434\u0443\u043c\u043a\u0430,\u00a0540 \u0441.<\/li>\n
                                                                                                                                                                                                                                                                                                            5. Kopeikina M.Yu., Klimenko S.A., Mel\u2019niichuk Yu.A., Beresnev V.M. Efficiency of cutting tools equipped with cBN-based polycrystalline superhard materials having vacuum\u2013plasma coating. Journal of Superhard Materials. 2008. Vol. 30, No. 5. \u0420. 355\u2014362. https:\/\/doi.org\/10.3103\/S1063457608050110<\/a><\/li>\n<\/ol>\n
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                                                                                                                                                                                                                                                                                                              1. \u041a\u043b\u0438\u043c\u0435\u043d\u043a\u043e \u0421.\u0410., \u0411\u0435\u0440\u0435\u0441\u043d\u0435\u0432 \u0412.\u041c., \u041a\u043e\u043f\u0435\u0439\u043a\u0438\u043d\u0430 \u041c.\u042e., \u0413\u0440\u0438\u0446\u0435\u043d\u043a\u043e \u0412.\u0418. \u0421\u043b\u043e\u0438\u0441\u0442\u044b\u0435 \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e-\u0434\u0443\u0433\u043e\u0432\u044b\u0435 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f Ti-NbN-Al2O3, Nb-NbN-Al2O3 \u043d\u0430 \u0438\u043d\u0441\u0442\u0440\u0443\u043c\u0435\u043d\u0442\u0430\u0445, \u043e\u0441\u043d\u0430\u0449\u0435\u043d\u043d\u044b\u0445 \u043f\u043e\u043b\u0438\u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u0438\u0447\u0435\u0441\u043a\u0438\u043c\u0438 \u0441\u0432\u0435\u0440\u0445\u0442\u0432\u0435\u0440\u0434\u044b\u043c\u0438 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u0430\u043c\u0438 \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u043a\u0443\u0431\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e \u043d\u0438\u0442\u0440\u0438\u0434\u0430 \u0431\u043e\u0440\u0430. \u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0430\u044f \u0438\u043d\u0436\u0435\u043d\u0435\u0440\u0438\u044f \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u0438. 2007. \u0422. 5, \u2116 1\u20142. C. 57\u201461.<\/li>\n
                                                                                                                                                                                                                                                                                                              2. \u041c\u0430\u043d\u043e\u0445\u0456\u043d A.C. \u0442\u0430 \u0456\u043d. \u0417\u043d\u043e\u0441 \u0456\u043d\u0441\u0442\u0440\u0443\u043c\u0435\u043d\u0442\u0456\u0432 \u0437 PcBN \u0456\u0437 \u043f\u043e\u043a\u0440\u0438\u0442\u0442\u044f\u043c\u0438 (TiAlSiY)N, Mo2N\/CrN. \u0421\u0443\u0447\u0430\u0441\u043d\u0456 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0456\u0457 \u0432 \u043c\u0430\u0448\u0438\u043d\u043e\u0431\u0443\u0434\u0443\u0432\u0430\u043d\u043d\u0456. 2018. \u0412\u0438\u043f. 13. \u0421. 33\u201441.<\/li>\n<\/ol>\n
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                                                                                                                                                                                                                                                                                                                1. \u041c\u0430\u043d\u043e\u0445\u0438\u043d \u0410.\u0421. \u0438 \u0434\u0440. \u0412\u043b\u0438\u044f\u043d\u0438\u0435 \u043f\u043e\u0434\u0433\u043e\u0442\u043e\u0432\u043a\u0438 \u0440\u0435\u0436\u0443\u0449\u0438\u0445 \u043f\u043b\u0430\u0441\u0442\u0438\u043d \u0438\u0437 P\u0441BN \u043f\u043e\u0434 \u043d\u0430\u043f\u044b\u043b\u0435\u043d\u0438\u0435 \u043d\u0430 \u0430\u0434\u0433\u0435\u0437\u0438\u043e\u043d\u043d\u0443\u044e \u043f\u0440\u043e\u0447\u043d\u043e\u0441\u0442\u044c \u0432 \u0441\u0438\u0441\u0442\u0435\u043c\u0435 \u00ab\u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0435-\u043e\u0441\u043d\u043e\u0432\u0430\u00bb \u0438 \u044d\u043a\u0441\u043f\u043b\u0443\u0430\u0442\u0430\u0446\u0438\u043e\u043d\u043d\u044b\u0435 \u0445\u0430\u0440\u0430\u043a\u0442\u0435\u0440\u0438\u0441\u0442\u0438\u043a\u0438 \u0438\u043d\u0441\u0442\u0440\u0443\u043c\u0435\u043d\u0442\u0430. \u0412\u0438\u0441\u043e\u043a\u0456 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0456\u0457 \u0432 \u043c\u0430\u0448\u0438\u043d\u043e\u0431\u0443\u0434\u0443\u0432\u0430\u043d\u043d\u0456. 2018. \u2116 1. \u0421. 98-109.<\/li>\n
                                                                                                                                                                                                                                                                                                                2. \u041c\u0430\u043d\u043e\u0445\u0456\u043d \u0410.\u0421., \u041a\u043b\u0438\u043c\u0435\u043d\u043a\u043e \u0421.\u0410., \u0411\u0435\u0440\u0435\u0441\u043d\u0454\u0432 \u0412.\u041c., \u041a\u043b\u0438\u043c\u0435\u043d\u043a\u043e \u0421.\u0410\u043d., \u041a\u043e\u043f\u0454\u0439\u043a\u0456\u043d\u0430 \u041c.\u042e., \u0421\u0442\u043e\u043b\u0431\u043e\u0432\u0438\u0439 \u0412.\u041e., \u041b\u0438\u0442\u043e\u0432\u0447\u0435\u043d\u043a\u043e \u0421.\u0412. \u0420\u0456\u0437\u0430\u043b\u044c\u043d\u0456 \u0456\u043d\u0441\u0442\u0440\u0443\u043c\u0435\u043d\u0442\u0438 \u0437 \u043a\u043e\u043c\u043f\u043e\u0437\u0438\u0442\u0456\u0432 \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0456 \u043a\u0443\u0431\u0456\u0447\u043d\u043e\u0433\u043e \u043d\u0456\u0442\u0440\u0438\u0434\u0443 \u0431\u043e\u0440\u0443 \u0437 \u043f\u043e\u043a\u0440\u0438\u0442\u0442\u044f\u043c. \u041a\u0438\u0457\u0432: \u041d\u0430\u0443\u043a\u043e\u0432\u0430 \u0434\u0443\u043c\u043a\u0430, 2023. 173 c. https:\/\/doi.org\/10.15407\/978-966-00-1844-0<\/a><\/li>\n<\/ol>\n<\/div>\n","protected":false},"excerpt":{"rendered":"

                                                                                                                                                                                                                                                                                                                  \u0410\u0432\u0442\u043e\u0440\u0441\u044c\u043a\u0438\u0439 \u043a\u043e\u043b\u0435\u043a\u0442\u0438\u0432: \u0410\u0437\u0430\u0440\u0454\u043d\u043a\u043e\u0432 \u041c\u0438\u043a\u043e\u043b\u0430 \u041e\u043b\u0435\u043a\u0441\u0456\u0439\u043e\u0432\u0438\u0447, \u0430\u043a\u0430\u0434\u0435\u043c\u0456\u043a \u041d\u0410\u041d \u0423\u043a\u0440\u0430\u0457\u043d\u0438, \u0434\u043e\u043a\u0442\u043e\u0440 \u0444\u0456\u0437\u0438\u043a\u043e-\u043c\u0430\u0442\u0435\u043c\u0430\u0442\u0438\u0447\u043d\u0438\u0445 \u043d\u0430\u0443\u043a, \u043f\u0440\u043e\u0444\u0435\u0441\u043e\u0440, \u041d\u0430\u0446\u0456\u043e\u043d\u0430\u043b\u044c\u043d\u0438\u0439 \u043d\u0430\u0443\u043a\u043e\u0432\u0438\u0439 \u0446\u0435\u043d\u0442\u0440 \u00ab\u0425\u0430\u0440\u043a\u0456\u0432\u0441\u044c\u043a\u0438\u0439 \u0444\u0456\u0437\u0438\u043a\u043e-\u0442\u0435\u0445\u043d\u0456\u0447\u043d\u0438\u0439 \u0456\u043d\u0441\u0442\u0438\u0442\u0443\u0442\u00bb \u041d\u0410\u041d \u0423\u043a\u0440\u0430\u0457\u043d\u0438, \u0432\u0438\u043a\u043e\u043d\u0443\u0432\u0430\u0447 \u043e\u0431\u043e\u0432\u2019\u044f\u0437\u043a\u0438 \u0413\u0435\u043d\u0435\u0440\u0430\u043b\u044c\u043d\u043e\u0433\u043e \u0434\u0438\u0440\u0435\u043a\u0442\u043e\u0440\u0430. ORCID ID: https:\/\/orcid.org\/0000-0002-4019-4933 Scopus Author ID: https:\/\/www.scopus.com\/authid\/detail.uri?authorId=7005703838 \u0411\u0435\u0440\u0435\u0441\u043d\u0454\u0432 \u0412\u2019\u044f\u0447\u0435\u0441\u043b\u0430\u0432 \u041c\u0430\u0440\u0442\u0438\u043d\u043e\u0432\u0438\u0447, \u0434\u043e\u043a\u0442\u043e\u0440 \u0442\u0435\u0445\u043d\u0456\u0447\u043d\u0438\u0445 \u043d\u0430\u0443\u043a, \u043f\u0440\u043e\u0444\u0435\u0441\u043e\u0440, \u0425\u0430\u0440\u043a\u0456\u0432\u0441\u044c\u043a\u0438\u0439 \u043d\u0430\u0446\u0456\u043e\u043d\u0430\u043b\u044c\u043d\u0438\u0439 \u0443\u043d\u0456\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442 \u0456\u043c\u0435\u043d\u0456 \u0412.\u041d. \u041a\u0430\u0440\u0430\u0437\u0456\u043d\u0430, \u043f\u0440\u043e\u0444\u0435\u0441\u043e\u0440 \u043a\u0430\u0444\u0435\u0434\u0440\u0438 \u043c\u0430\u0442\u0435\u0440\u0456\u0430\u043b\u0456\u0432 \u0440\u0435\u0430\u043a\u0442\u043e\u0440\u043e\u0431\u0443\u0434\u0443\u0432\u0430\u043d\u043d\u044f \u0442\u0430 \u0444\u0456\u0437\u0438\u0447\u043d\u0438\u0445 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0456\u0439 ORCID ID: https:\/\/orcid.org\/0000-0002-4623-3243 Scopus […]<\/p>\n","protected":false},"author":3,"featured_media":6924,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[4,21],"tags":[],"class_list":["post-6923","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-books","category-scientific_monographs"],"_links":{"self":[{"href":"https:\/\/akademperiodyka.org.ua\/uk\/wp-json\/wp\/v2\/posts\/6923","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/akademperiodyka.org.ua\/uk\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/akademperiodyka.org.ua\/uk\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/akademperiodyka.org.ua\/uk\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/akademperiodyka.org.ua\/uk\/wp-json\/wp\/v2\/comments?post=6923"}],"version-history":[{"count":31,"href":"https:\/\/akademperiodyka.org.ua\/uk\/wp-json\/wp\/v2\/posts\/6923\/revisions"}],"predecessor-version":[{"id":8063,"href":"https:\/\/akademperiodyka.org.ua\/uk\/wp-json\/wp\/v2\/posts\/6923\/revisions\/8063"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/akademperiodyka.org.ua\/uk\/wp-json\/wp\/v2\/media\/6924"}],"wp:attachment":[{"href":"https:\/\/akademperiodyka.org.ua\/uk\/wp-json\/wp\/v2\/media?parent=6923"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/akademperiodyka.org.ua\/uk\/wp-json\/wp\/v2\/categories?post=6923"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/akademperiodyka.org.ua\/uk\/wp-json\/wp\/v2\/tags?post=6923"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}